Patents by Inventor Carina T. Leveriza

Carina T. Leveriza has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon containing resists
    Patent number: 4764247
    Abstract: The fabrication of improved semiconductor devices having photoresist materials in the form of silicon containing polystyrene copolymers of a halomethylstyrene and an alkylsilylstyrene and the resulting improved semiconductor wafer device containing silicon prior to etching; the resulting resist having reduced resist erosion and improved plasma resiliency.
    Type: Grant
    Filed: March 18, 1987
    Date of Patent: August 16, 1988
    Assignee: Syn Labs, Inc.
    Inventors: Carina T. Leveriza, Russell A. Morgan