Abstract: A method of manufacturing a miniature electromechanical system (MEMS) device includes the steps of forming a moving member on a first substrate such that a first sacrificial layer is disposed between the moving member and the substrate, encapsulating the moving member, including the first sacrificial layer, with a second sacrificial layer, coating the encapsulating second sacrificial layer with a first film formed of a material that establishes an hermetic seal with the substrate, and removing the first and second sacrificial layers.

Abstract: A method of manufacturing a miniature electromechanical system (MEMS) device includes the steps of forming a moving member on a first substrate such that a first sacrificial layer is disposed between the moving member and the substrate, encapsulating the moving member, including the first sacrificial layer, with a second sacrificial layer, coating the encapsulating second sacrificial layer with a first film formed of a material that establishes an hermetic seal with the substrate, and removing the first and second sacrificial layers.

Abstract: An electronically steerable antenna array which includes time delay units connected to individual antenna elements for time delaying a microwave signal to and/or from the antenna elements. Each time delay unit includes small mercury wetted switches for controlling signal flow via a time delay path or a bypass path, through the time delay unit from a signal input to a signal output.

Abstract: A switch having spaced apart conductors with a high resistivity gate member therebetween. First and second mercury droplets are respectively connected to the ends of the conductors. When a control signal is applied to the gate member, the mercury droplets are drawn to it and establish electrical connection between the conductors to close the switch. Upon removal of the control signal the mercury droplets separate and assume their initial droplet form thus opening the switch.

Abstract: A gas ionizer is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The gas ionizer is located in a cavity provided in a semiconductor substrate which includes an inlet for introducing the gas to be analyzed. The gas ionizer ionizes the sample of gas drawn into the cavity through the inlet to generate an ionized sample gas. The gas ionizer generates energetic particles or photons which bombard the gas to be sampled to produce ionized gas. The energetic particles or photons can be generated by reverse-bias p-n junctions, radioactive isotopes, electron discharges, point emitters, and thermionic electron emitters. A layer of cesium chloride or cesium iodide having a low work function is formed on top of the reverse-bias p-n junction gas ionizer to increase current emitted per junction area and so that the gas ionizer can be exposed to atmospheric oxygen during storage and can operate in reduced atmosphere with no additional treatments.

Abstract: A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one diaphragm and electrically-actuated resistor. The resistor generates heat upon electrical actuation thereby causing the diaphragm to accomplish a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a bilayered metal material having different thermal expansion rates or from a shape memory alloy.

Abstract: A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.

Abstract: A detector is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The detector is adapted to detect the filtering of an ionized sample of the gas. The detector includes a linear array of detector elements, each detector element being connected to a Faraday cage having v-shaped conductors. The Faraday cage is formed on a cavity provided in a semiconductor substrate upon which the solid state mass-spectrograph is constructed. The detector elements include signal generators located outside of the cavity and connected to the Faraday cage, and charge sensing means in the form of either a MOS switch or a charge-coupled device.

Abstract: A method for forming a solid state mass spectrograph for analyzing a sample gas is provided in which a plurality of cavities are formed in a substrate, preferably, a semiconductor. Each of these cavities forms a chamber into which a different component of the mass spectrograph is provided. A plurality of orifices are formed between each of the cavities, forming an interconnecting passageway between each of the chambers. A dielectric layer is provided inside the cavities to serve as a separator between the substrate and electrodes to be later deposited in the cavity. An ionizer is provided in one of the cavities and an ion detector is provided in another of the cavities. The formed substrate is provided in a circuit board which contains interfacing and controlling electronics for the mass spectrograph. Preferably, the substrate is formed in two halves and the chambers are formed in a corresponding arrangement in each of the substrate halves.

Abstract: A preconcentrator is provided for use in a solid state mass spectrograph for analyzing a sample gas. The mass spectrograph is formed from a semiconductor substrate and has a cavity with an inlet, a gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The preconcentrator is provided in the mass spectrograph between the inlet and gas ionizing section. The preconcentrator includes an array of preconcentrating elements, each of which is built upon a semiconductor substrate upon which a dielectric membrane has been deposited. An absorber is provided on the membrane for collecting and concentrating the gas to be sampled. Heater means provided on the membrane releases the absorbed sample gas from the absorber.

Abstract: A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one piezoelectrically-actuated diaphragm. Upon piezoelectrical actuation, the diaphragm accomplishes a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a pair of electrodes sandwiching a piezoelectric layer.

Abstract: A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.

Abstract: A layer selected from a group comprising: molybdenum, tantalum, tungsten, osmium, rhenium, ruthenium and an alloy of two or more thereof on the under surface of an electrical contact acts as a barrier to copper diffusion from the braze material into the contact structure. A thin nickel layer on the barrier facilitates the brazing of the barrier coated contact surface to the copper electrodes.

Abstract: An electrical vacuum interrupter comprising a pair of separable contacts enclosed within a vacuum enclosure whose walls have joints formed of a polymeric material which can maintain sufficient vacuum, mechanical, thermal, and electrical properties to permit proper operation. Major part of the vacuum enclosure, in addition to the joint, may be formed of a polymeric material. A method of assembly is provided that avoids need for high temperatures and includes use of electrical discharge between the contacts for cleaning the interior of the vacuum enclosure.