Abstract: An apparatus for the automated measurement and recording of the electrical resistivity of a semiconductor boule or ingot using the method of four probes has a four point boule support grid is provided adjacent to the home position of a four tip probe which is equipped with three axis linear mobility, rotational capability, and computer control, to provide automated mapping and testing of an “as grown” or ground semiconductor boule with cropped ends, for obtaining and recording resistivity data.

Abstract: An apparatus for the automated measurement and recording of the electrical resistivity of a semiconductor boule or ingot using the method of four probes. A four point boule support grid is provided adjacent to the home position of a four tip probe equipped with three axis linear mobility, rotational capability, and computer control, to enable automated mapping and testing of an “as grown” or ground semiconductor boule with cropped ends, for obtaining and recording all necessary resistivity data. The apparatus converts resistivity data to ASTM standards and reads over a wide resistivity range. The apparatus has all data logging capabilities and full computer control interfaces, and adapts readily to a production line setup with automated delivery and removal of boules under test.

Abstract: An apparatus for and a method of sealing a rotating shaft in a crystal-growing furnace, wherein the crystal-growing furnace includes a chamber adapted to be maintained at a contaminant-free inert atmosphere, with an inert gas at a low pressure, a rotatable shaft element which extends into the chamber, and a seal surrounding the shaft element, to separate the atmospheric pressure outside of the chamber from the low-pressure, contaminant-free atmosphere within the chamber, the seal having a plurality of sealing elements spaced apart along the shaft and defining an annular cavity between the sealing elements, the improvement which comprises means to and a method of maintaining an inert-gas atmosphere within the sealed cavity at a pressure slightly higher than the outside atmospheric pressure or the low pressure of the chamber, whereby, on failure of the sealing elements, inert gas passes from the cavity to the atmosphere or to the low-pressure chamber, thereby preventing the contamination of the chamber with atm

Abstract: An apparatus for and a method of handling grown crystal ingots from a crystal-growing furnace, which apparatus and method include: lifting and moving an upper crystal chamber with the crystal supported therein to one side of the furnace; and gently lowering the crystal into a lower crystal chamber positioned beneath the upper crystal chamber and on a wheeled vehicle, which permits ease in removal and transport of hot heavy crystals with minimum damage or fracture.