Patents by Inventor Carlos H. Diaz

Carlos H. Diaz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210390987
    Abstract: Disclosed herein are related to a circuit and a method of reading or sensing multiple bits of data stored by a multi-level cell. In one aspect, a first reference circuit is selected from a first set of reference circuits, and a second reference circuit is selected from a second set of reference circuits. Based at least in part on the first reference circuit and the second reference circuit, one or more bits of multiple bits of data stored by a multi-level cell can be determined. According to the determined one or more bits, a third reference circuit from the first set of reference circuits and a fourth reference circuit from the second set of reference circuits can be selected. Based at least in part on the third reference circuit and the fourth reference circuit, additional one or more bits of the multiple bits of data stored by the multi-level cell can be determined.
    Type: Application
    Filed: June 15, 2020
    Publication date: December 16, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Qing Dong, Mahmut Sinangil, Yen-Ting Lin, Kerem Akarvardar, Carlos H. Diaz, Yih Wang
  • Patent number: 11167984
    Abstract: A NEMS device structure and a method for forming the same are provided. The NEMS device structure includes a first dielectric layer formed over a substrate, and a first conductive layer formed in the first dielectric layer. The NEMS device structure includes a second dielectric layer formed over the first dielectric layer, and a first supporting electrode a second supporting electrode and a beam structure formed in the second dielectric layer. The beam structure is formed between the first supporting electrode and the second supporting electrode, and the beam structure has a T-shaped structure. The NEMS device structure includes a first through hole formed between the first supporting electrode and the beam structure, and a second through hole formed between the second supporting electrode and the beam structure.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: November 9, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Ping Chen, Carlos H. Diaz, Ken-Ichi Goto, Shau-Lin Shue, Tai-I Yang
  • Patent number: 11152565
    Abstract: A memory device includes a conductive wire, a first 2-D material layer, a phase change element, and a top electrode. The first 2-D material layer is over the conductive wire. The phase change element extends along a surface of the first 2-D material layer distal to the conductive layer. The top electrode is over the phase change element.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: October 19, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Sheng Chen, Da-Ching Chiou, Jau-Yi Wu, Carlos H. Diaz
  • Patent number: 11145748
    Abstract: One or more semiconductor arrangements and techniques for forming such semiconductor arrangements are provided. A semiconductor arrangement comprises a channel, such as an un-doped channel, over a substrate. The semiconductor arrangement comprises a gate, such as a gate-all-around structure gate, around the channel. The semiconductor arrangement comprises an isolation structure, such as a silicon germanium oxide structure, between the gate and the substrate. The isolation structure blocks current leakage into the substrate. Because the semiconductor arrangement comprises the isolation structure, the channel can be left un-doped, which improves electron mobility and decreases gate capacitance.
    Type: Grant
    Filed: April 16, 2018
    Date of Patent: October 12, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Kuo-Cheng Ching, Ching-Wei Tsai, Chih-Hao Wang, Carlos H. Diaz
  • Patent number: 11145806
    Abstract: A device includes a plurality of bottom electrode features, a plurality of Magnetic Tunnel Junction (MTJ) stacks formed on top surfaces of the bottom electrode features, top electrode features formed on top of the MTJ stacks, and an etch stop layer extending along side surfaces of the bottom electrode feature and partially along side surfaces of the MTJ stacks.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: October 12, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Carlos H. Diaz, Harry-Hak-Lay Chuang, Ru-Liang Lee
  • Patent number: 11127734
    Abstract: An electrostatic discharge (ESD) protection circuit includes an input terminal, a transistor, and an output terminal. The input terminal is configured to receive an input signal. The transistor includes a first source/drain region, a second source/drain region, and a drift region that has a resistance in series between the first and second source/drain regions and that is configured to attenuate an ESD voltage in the input signal. The output terminal is connected to the second source/drain region.
    Type: Grant
    Filed: November 7, 2019
    Date of Patent: September 21, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jean-Pierre Colinge, Ta-Pen Guo, Carlos H. Diaz
  • Patent number: 11114540
    Abstract: A semiconductor device includes a first potential supply line for supplying a first potential, a second potential supply line for supplying a second potential lower than the first potential, a functional circuit, and at least one of a first switch disposed between the first potential supply line and the functional circuit and a second switch disposed between the second potential supply line and the functional circuit. The first switch and the second switch are negative capacitance FET.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: September 7, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Hsing Lee, Chih-Sheng Chang, Wilman Tsai, Chia-Wen Chang, Ling-Yen Yeh, Carlos H. Diaz
  • Publication number: 20210273100
    Abstract: A multi-gate semiconductor device is formed that provides a first fin element extending from a substrate. A gate structure extends over a channel region of the first fin element. The channel region of the first fin element includes a plurality of channel semiconductor layers each surrounded by a portion of the gate structure. A source/drain region of the first fin element is adjacent the gate structure. The source/drain region includes a first semiconductor layer, a dielectric layer over the first semiconductor layer, and a second semiconductor layer over the dielectric layer.
    Type: Application
    Filed: May 18, 2021
    Publication date: September 2, 2021
    Inventors: Kuo-Cheng CHING, Ching-Wei TSAI, Carlos H. DIAZ, Chih-Hao WANG, Wai-Yi LIEN, Ying-Keung LEUNG
  • Patent number: 11104573
    Abstract: A semiconductor arrangement includes a substrate region and a first semiconductor column projecting from the substrate region. The semiconductor arrangement includes a second semiconductor column projecting from the substrate region and adjacent the first semiconductor column. The second semiconductor column is separated a first distance from the first semiconductor column along a first axis. The semiconductor arrangement includes a third semiconductor column projecting from the substrate region and adjacent the first semiconductor column. The third semiconductor column is separated a second distance from the first semiconductor column along a second axis that is substantially perpendicular to the first axis. The second distance is different than the first distance.
    Type: Grant
    Filed: May 20, 2019
    Date of Patent: August 31, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Jean-Pierre Colinge, Ta-Pen Guo, Chih-Hao Wang, Carlos H. Diaz
  • Patent number: 11063128
    Abstract: A semiconductor device includes a fin having a first semiconductor material, the fin having a source/drain (S/D) region and a channel region, the S/D region providing a top surface and two sidewall surfaces; an isolation structure surrounding a bottom portion of the fin, wherein the S/D region of the fin above the isolation structure has a step profile in each of the two sidewall surfaces; a semiconductor film over the S/D region and having a doped second semiconductor material, the semiconductor film providing a top surface and two sidewall surfaces over the top and two sidewall surfaces of the fin respectively, wherein the doped second semiconductor material is different from the first semiconductor material; and a metal contact over the top and two sidewall surfaces of the semiconductor film and operable to electrically communicate with the S/D region.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: July 13, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yee-Chia Yeo, Carlos H. Diaz, Chih-Hao Wang, Ling-Yen Yeh, Yuan-Chen Sun
  • Patent number: 11043597
    Abstract: Semiconductor structures and methods reduce contact resistance, while retaining cost effectiveness for integration into the process flow by introducing a heavily-doped contact layer disposed between two adjacent layers. The heavily-doped contact layer may be formed through a solid-phase epitaxial regrowth method. The contact resistance may be tuned by adjusting dopant concentration and contact area configuration of the heavily-doped epitaxial contact layer.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: June 22, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jean-Pierre Colinge, Carlos H. Diaz
  • Publication number: 20210183708
    Abstract: In a method of manufacturing a circuit including a MOSFET disposed in a MOSFET region and a negative capacitance FET (NCFET) disposed in a NCFET region, a dielectric layer is formed over a channel layer in the MOSFET region and the NCFET region. A first metallic layer is formed over the dielectric layer in the MOSFET region and the NCFET region. After the first metallic layer is formed, an annealing operation is performed only in the NCFET region. After the annealing operation, the first metallic layer is removed from the MOSFET region and the NCFET region. The annealing operation includes irradiating the first metallic layer and the dielectric layer in the NCFET region with an energy beam.
    Type: Application
    Filed: December 21, 2020
    Publication date: June 17, 2021
    Inventors: Ling-Yen YEH, Carlos H. DIAZ, Wilman TSAI
  • Patent number: 11038052
    Abstract: A semiconductor arrangement comprises a substrate region and a first semiconductor column projecting from the substrate region. The semiconductor arrangement comprises a second semiconductor column projecting from the substrate region. The second semiconductor column is separated a first distance from the first semiconductor column. The first distance is between about 10 nm to about 30 nm.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: June 15, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Jean-Pierre Colinge, Kuo-Cheng Ching, Ta-Pen Guo, Carlos H. Diaz
  • Publication number: 20210175367
    Abstract: A nanowire FET device includes a vertical stack of nanowire strips configured as the semiconductor body. One or more of the top nanowire strips are receded and are shorter than the rest of the nanowire strips stacked lower. Inner spacers are uniformly formed adjacent to the receded nanowire strips and the rest of the nanowire strips. Source/drain structures are formed outside the inner spacers and a gate structure is formed inside the inner spacers, which wraps around the nanowire strips.
    Type: Application
    Filed: February 22, 2021
    Publication date: June 10, 2021
    Inventors: I-Sheng Chen, Chao-Ching Cheng, Tzu-Chiang Chen, Carlos H. Diaz
  • Publication number: 20210175342
    Abstract: In a method of manufacturing a negative capacitance structure, a dielectric layer is formed over a substrate. A first metallic layer is formed over the dielectric layer. After the first metallic layer is formed, an annealing operation is performed, followed by a cooling operation. A second metallic layer is formed. After the cooling operation, the dielectric layer becomes a ferroelectric dielectric layer including an orthorhombic crystal phase.
    Type: Application
    Filed: February 19, 2021
    Publication date: June 10, 2021
    Inventors: Chun-Chieh LU, Cheng-Yi PENG, Chien-Hsing LEE, Ling-Yen YEH, Chih-Sheng CHANG, Carlos H. DIAZ
  • Patent number: 11011427
    Abstract: A semiconductor layer is etched into a plurality of fin structures. A first nitridation process is performed to side surfaces of the fin structures. The first nitridation process forms a first oxynitride layer at the side surfaces of the fin structures. A liner oxide layer is formed on the first oxynitride layer. An isolation structure is formed around the fin structures after the forming of the liner oxide layer.
    Type: Grant
    Filed: July 9, 2019
    Date of Patent: May 18, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Ching, Shi Ning Ju, Chih-Hao Wang, Ying-Keung Leung, Carlos H. Diaz
  • Publication number: 20210134362
    Abstract: A read method and a write method for a memory circuit are provided, wherein the memory circuit includes a memory cell and a selector electrically coupled to the memory cell. The read method includes applying a first voltage to the selector, wherein a first voltage level of the first voltage is larger than a voltage threshold corresponding to the selector; and applying, after the applying of the first voltage, a second voltage to the selector to sense one or more bit values stored in the memory cell, wherein a second voltage level of the second voltage is constant and smaller than the voltage threshold, wherein a first duration of the applying of the first voltage is smaller than a second duration of the applying of the second voltage, wherein the second voltage is applied following the end of the first duration.
    Type: Application
    Filed: September 10, 2020
    Publication date: May 6, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Carlos H. Diaz, Hung-Li Chiang, Tzu-Chiang Chen, Yih Wang
  • Patent number: 10985159
    Abstract: A method for manufacturing a monolithic three-dimensional (3D) integrated circuit (IC) with junctionless semiconductor devices (JSDs) is provided. A first interlayer dielectric (ILD) layer is formed over a semiconductor substrate, while also forming first vias and first interconnect wires alternatingly stacked in the first ILD layer. A first doping-type layer and a second doping-type layer are transferred to a top surface of the first ILD layer. The first and second doping-type layers are stacked and are semiconductor materials with opposite doping types. The first and second doping-type layers are patterned to form a first doping-type wire and a second doping-type wire overlying the first doping-type wire. A gate electrode is formed straddling the first and second doping-type wires. The gate electrode and the first and second doping-type wires at least partially define a JSD.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: April 20, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jean-Pierre Colinge, Carlos H. Diaz, Ta-Pen Guo
  • Publication number: 20210104618
    Abstract: According to another embodiment, a method of forming a transistor is provided. The method includes the following operations: providing a substrate; providing a source over the substrate; providing a channel connected to the source; providing a drain connected to the channel; providing a gate insulator adjacent to the channel; providing a gate adjacent to the gate insulator; providing a first interlayer dielectric between the source and the gate; and providing a second interlayer dielectric between the drain and the gate, wherein at least one of the formation of the source, the drain, and the channel includes about 20-95 atomic percent of Sn.
    Type: Application
    Filed: November 30, 2020
    Publication date: April 8, 2021
    Inventors: Jean-Pierre Colinge, Carlos H. Diaz
  • Patent number: 10964691
    Abstract: A method for manufacturing a monolithic three-dimensional (3D) integrated circuit (IC) with junctionless semiconductor devices (JSDs) is provided. A first interlayer dielectric (ILD) layer is formed over a semiconductor substrate, while also forming first vias and first interconnect wires alternatingly stacked in the first ILD layer. A first doping-type layer and a second doping-type layer are transferred to a top surface of the first ILD layer. The first and second doping-type layers are stacked and are semiconductor materials with opposite doping types. The first and second doping-type layers are patterned to form a first doping-type wire and a second doping-type wire overlying the first doping-type wire. A gate electrode is formed straddling the first and second doping-type wires. The gate electrode and the first and second doping-type wires at least partially define a JSD.
    Type: Grant
    Filed: September 4, 2019
    Date of Patent: March 30, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jean-Pierre Colinge, Carlos H. Diaz, Ta-Pen Guo