Abstract: A method is provided for subtractively processing a layer of etchable material formed over an electrically conductive surface region of a workpiece. The workpiece is immersed in a liquid solution, generally but not exclusively a conductive solution, that comprises an etchant for the etchable material, so that etching of the etchable material is initiated. An electric circuit is connected to include a control electrode, a reference electrode, and the electrically conductive surface region of the workpiece. The electric circuit is used to monitor the development process dynamically at each of a plurality of intervals during the etching. The etching is terminated when the electrochemical signal satisfies a criterion indicating that the etching is complete.

Abstract: We provide an electrochemical sensor in which working microelectrodes are arranged in an array and interconnected in parallel. The working electrodes are arranged so that in use, they are electrochemically coupled to a counter electrode structure through an electrolyte. The sensor also includes a microporous body arranged so that in use, it is situated at a boundary between a gaseous environment and the electrolyte. In another aspect, we provide a method of sensing in which a sample of gas is admitted to a liquid electrolyte maintained by pores of a porous substrate. A voltage is applied to the liquid electrolyte, and an electrical response to the applied voltage is observed, thereby to detect electrochemical evidence of an analyte within the liquid electrolyte.

Abstract: Contour-mode piezoelectric devices and methods of forming contour mode piezoelectric devices. The contour mode piezoelectric device includes a piezoelectric film having first and second surfaces and suspended so that it is spaced away from a substrate. The contour mode piezoelectric device also includes first and second patterned electrodes respectively disposed on the first and second surfaces of the piezoelectric film, at least one of the first and second patterned electrodes having variable width along a length thereof.

Abstract: Contour-mode piezoelectric devices and methods of forming contour mode piezoelectric devices. The contour mode piezoelectric device includes a piezoelectric film having first and second surfaces and suspended so that it is spaced away from a substrate. The contour mode piezoelectric device also includes first and second patterned electrodes respectively disposed on the first and second surfaces of the piezoelectric film, at least one of the first and second patterned electrodes having variable width along a length thereof.