Patents by Inventor Carolina Poe

Carolina Poe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photoresist coating scheme
    Patent number: 9720325
    Abstract: A method includes rotating a wafer at a first speed for a first time duration. The wafer is rotated at a second speed that is lower than the first speed for a second time duration after the first time duration. The wafer is rotated at a third speed that is higher than the second speed for a third time duration after the second time duration. A photoresist is dispensed on the wafer during the first time duration and at least a portion of a time interval that includes the second time duration and the third time duration.
    Type: Grant
    Filed: September 17, 2013
    Date of Patent: August 1, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hsien Hsu, Hong-Hsing Chou, Hu-Wei Lin, Chi-Jen Hsieh, Jr-Wei Ye, Yuan-Ting Huang, Ching-Hsing Chiang, Hua-Kuang Teng, Yen-Chen Lin, Carolina Poe, Tsung-Cheng Huang, Chia-Hung Chu
  • Photoresist Coating Scheme
    Publication number: 20150079806
    Abstract: A method includes rotating a wafer at a first speed for a first time duration. The wafer is rotated at a second speed that is lower than the first speed for a second time duration after the first time duration. The wafer is rotated at a third speed that is higher than the second speed for a third time duration after the second time duration. A photoresist is dispensed on the wafer during the first time duration and at least a portion of a time interval that includes the second time duration and the third time duration.
    Type: Application
    Filed: September 17, 2013
    Publication date: March 19, 2015
    Inventors: Chih-Hsien Hsu, Hong-Hsing Chou, Hu-Wei Lin, Chi-Jen Hsieh, Jr-Wei Ye, Yuan-Ting Huang, Ching-Hsing Chiang, Hua-Kuang Teng, Yen-Chen Lin, Carolina Poe, Tsung-Cheng Huang, Chia-Hung Chu