Abstract: The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The device is arranged in such a way that the light, emitted by the light source, is propagated through the substrate, before reaching the cavity.

Abstract: The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The device is arranged in such a way that the light, emitted by the light source, is propagated through the substrate, before reaching the cavity.

Abstract: A method of manufacturing a plurality of resonators, each formed by a membrane sealing a cavity, includes forming a plurality of cavities starting from one face called the front face of a support substrate, the plurality of cavities comprising central cavities and peripheral cavities arranged around the assembly formed by the central cavities, and forming central membranes and peripheral membranes covering the central cavities and peripheral cavities, respectively, by the transfer of a coverage film on the front face of the support substrate. At least part of the peripheral membranes is removed.

Abstract: A method for sealing cavities using membranes, the method including a) forming cavities arranged in a matrix, of a depth p, a characteristic dimension a, and spaced apart by a spacing b; and b) forming membranes, sealing the cavities, by transferring a sealing film. The method further includes a step a1), executed before step b), of forming a first contour on the front face and/or on the sealing face, the first contour comprising a first trench having a width L and a first depth p1, the formation of the first contour being executed such that after step b) the cavities are circumscribed by the first contour, said first contour being at a distance G from the cavities between one-fifth of b and five b.

Abstract: An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge.

Abstract: The invention relates to a method of manufacturing a plurality of resonators, each formed by a membrane sealing a cavity, the method comprises: a) a step to form a plurality of cavities, advantageously identical, starting from one face called the front face of a support substrate, the plurality of cavities comprise central cavities and peripheral cavities arranged around the assembly formed by the central cavities; b) a step to form membranes, called central membranes and peripheral membranes respectively, covering central cavities and peripheral cavities respectively, by the transfer of a coverage film on the front face of the support substrate; c) a step to remove at least part of the peripheral membranes.

Abstract: An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge.

Abstract: A device for managing an accumulator, including: a plurality of strain gauges including at least three strain gauges, the strain gauges being arranged to measure stresses along at least three distinct stress axes; a measuring device measuring strains undergone by each gauge along its stress axis; a reversible electrical switch; a calculating device controlling opening and closing of the electrical switch, depending on measurements carried out by the measuring device.

Abstract: A measurement system of a tangential force applied by a fluid is provided. The system includes a pipe in which the fluid flows, the pipe includes an inner surface contacting the fluid, and a cavity arranged in the inner surface of the pipe: and a MEMS and/or NEMS device measuring the tangential force including a support, a moving plate suspended from the support by a pivot link, the moving plate including a first face on which the fluid applies a tangential force. The device is fixed to the pipe such that the first face of the moving plate is flush with the inner surface of the pipe. The device includes two piezoresistive strain gauges suspended between the moving plate and the support, the tangential force applying force to the gauges.

Abstract: A device for managing an accumulator, including: a plurality of strain gauges including at least three strain gauges, the strain gauges being arranged to measure stresses along at least three distinct stress axes; a measuring device measuring strains undergone by each gauge along its stress axis; a reversible electrical switch; a calculating device controlling opening and closing of the electrical switch, depending on measurements carried out by the measuring device.

Abstract: A microsystem, including a magnetic microactuator, with a mobile element supported by a substrate and controlled by magnetic effect between a first position and a second position for switching at least one electric circuit. A permanent magnet or a solenoid subjects the mobile element to a first uniform magnetic field to hold the mobile element in the first position. An energizing coil external to the substrate, on energizing, subjects the mobile element to a second magnetic field to move the mobile element from the first position to the second position, the energizing coil being of solenoid type and surrounding the substrate supporting the mobile element.

Abstract: The invention relates to a microsystem, comprising a magnetic microactuator (2, 2?), with a mobile element supported by a substrate (3) and controlled by magnetic effect between a first position and a second position for switching at least one electric circuit, whereby a permanent magnet or a solenoid subjects the mobile element to a first uniform magnetic field (B0) to hold the same in the first position, an energising coil (4, 6), external to the substrate (3), said energising coil (4, 6), on energising the above, submits the mobile element to a second magnetic field (BSi) to move the mobile element from the first position to the second position, the energising coil being of the solenoid type and surrounding the substrate supporting the mobile element.