Patents by Inventor Celina M. Esteban

Celina M. Esteban has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plating uniformity control by contact ring shaping
    Patent number: 7025862
    Abstract: An apparatus for providing an electrical bias to a substrate in a processing system is described. The apparatus generally includes a conductive annular body defining a central opening. The conductive annular body may have a substrate seating surface adapted to receive the substrate and a plurality of scallops formed on a surface opposing the substrate seating surface. A plurality of electrical contacts may be formed on the substrate seating surface opposite the plurality of scallops. The electrical contacts may be adapted to engage a plating surface of the substrate.
    Type: Grant
    Filed: October 22, 2002
    Date of Patent: April 11, 2006
    Assignee: Applied Materials
    Inventors: Harald Herchen, Henan Hao, Celina M. Esteban, Timothy R. Webb, Son N. Trinh
  • Plating uniformity control by contact ring shaping
    Publication number: 20040074761
    Abstract: An apparatus for providing an electrical bias to a substrate in a processing system is described. The apparatus generally includes a conductive annular body defining a central opening. The conductive annular body may have a substrate seating surface adapted to receive the substrate and a plurality of scallops formed on a surface opposing the substrate seating surface. A plurality of electrical contacts may be formed on the substrate seating surface opposite the plurality of scallops. The electrical contacts may be adapted to engage a plating surface of the substrate.
    Type: Application
    Filed: October 22, 2002
    Publication date: April 22, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Harald Herchen, Henan Hao, Celina M. Esteban, Timothy R. Webb, Son N. Trinh