Patents by Inventor Cha Sub Shim

Cha Sub Shim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for processing substrate
    Patent number: 11897006
    Abstract: The present disclosure provides a substrate processing apparatus and a substrate processing method. The substrate processing apparatus includes a substrate support unit configured to support a substrate, a liquid supply unit configured to supply a liquid containing any one of a chemical liquid and a cleaning liquid to the substrate supported by the substrate support unit, a processing container configured to accommodate the substrate support unit and recover the liquid supplied to the substrate from the liquid supply unit, and a capture module provided in the processing container to capture the liquid so as to suppress the liquid scattered from the substrate from being bounced back from the processing container and re-scattering.
    Type: Grant
    Filed: May 10, 2022
    Date of Patent: February 13, 2024
    Assignee: SEMES CO., LTD.
    Inventors: Ki Young Kwak, Sang Young Kwon, Cha Sub Shim
  • APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
    Publication number: 20220379351
    Abstract: The present disclosure provides a substrate processing apparatus and a substrate processing method. The substrate processing apparatus includes a substrate support unit configured to support a substrate, a liquid supply unit configured to supply a liquid containing any one of a chemical liquid and a cleaning liquid to the substrate supported by the substrate support unit, a processing container configured to accommodate the substrate support unit and recover the liquid supplied to the substrate from the liquid supply unit, and a capture module provided in the processing container to capture the liquid so as to suppress the liquid scattered from the substrate from being bounced back from the processing container and re-scattering.
    Type: Application
    Filed: May 10, 2022
    Publication date: December 1, 2022
    Inventors: Ki Young KWAK, Sang Young Kwon, Cha Sub Shim