Patents by Inventor Chae Il IM

Chae Il IM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EDGE RING COOLING MODULE FOR SEMI-CONDUCTOR MANUFACTURE CHUCK
    Publication number: 20140262193
    Abstract: An edge ring cooling module for semiconductor manufacturing chuck is provided which effectively cools the edge ring equipped in electrostatic chuck. The edge ring cooling module forcibly exhausts the heat of an edge ring (20) using an electronic cooling device (32) to top of a large-diameter portion (11) to effectively cool the edge ring (20) so that the temperature of the edge ring (20) is similar to that of top of a small-diameter portion (12) of a chuck body (10) to eventually improve the yield ratio while reducing the failure ratio.
    Type: Application
    Filed: March 11, 2014
    Publication date: September 18, 2014
    Applicant: Techest Co., Ltd.
    Inventors: Chae Il IM, Cheol Won Jang