Abstract: An embodiment manual seatback folding apparatus of an electric seat for a vehicle includes a shaft fastened to a seatback frame, wherein first and second end portions of the shaft are rotatably inserted into first and second seat cushion side frames, respectively, a first rotatable disk including a first locking recess, a second rotatable disk including a second locking recess and a pusher, a first manual control device detachably engaged with the first locking recess, a second manual control device to be connected to the first manual control device through a cable and detachably engaged with the second locking recess, and a switch device mounted on an outer surface of the second seat cushion side frame and configured to perform a switching operation in response to the pusher in a state in which the second rotatable disk is rotated in a folding direction.

Abstract: The present invention provides an apparatus and method for detecting or inspecting defects on a polishing pad for use in performing chemical mechanical polishing of a wafer. The apparatus for detecting the defects on the pad comprises a pad driving device for loading the pad thereon and moving the pad, at least one camera installed to face the pad for converting an image of the pad into an electrical signal and outputting the converted electrical signal, a digital image data acquisition device for converting the electrical signal transmitted from the camera into a digital signal, and an image data processing unit for processing the image data and detecting the defects on the pad.

Abstract: The present invention provides an apparatus and method for detecting or inspecting defects on a polishing pad for use in performing chemical mechanical polishing of a wafer. The apparatus for detecting the defects on the pad comprises a pad driving device for loading the pad thereon and moving the pad, at least one camera installed to face the pad for converting an image of the pad into an electrical signal and outputting the converted electrical signal, a digital image data acquisition device for converting the electrical signal transmitted from the camera into a digital signal, and an image data processing unit for processing the image data and detecting the defects on the pad.