Patents by Inventor Chandru Kappuswamy

Chandru Kappuswamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Real time control of plasma etch utilizing multivariate statistical analysis
    Patent number: 5479340
    Abstract: Hotelling's T.sup.2 statistical analysis and control is used to provide multivariate analysis of components of an RF spectra for real time, in-situ control of an ongoing semiconductor process. An algorithm calculates the T.sup.2 value which is then used to generate a feedback signal, if the T.sup.2 value is out of range, to indicate an out-of-tolerance condition.
    Type: Grant
    Filed: September 20, 1993
    Date of Patent: December 26, 1995
    Assignees: Sematech, Inc., Intel Corporation
    Inventors: Edward P. Fox, Chandru Kappuswamy