Abstract: An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, an output terminal, a sensor unit, a flow rate control valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts an actual setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a storage module, a setting signal calibration module and a calculation module. The valve control circuit generates, based on a control signal, an openness control signal, so as to control the flow rate control valve. It is concluded that the flow rate control quality is improved by the present invention.

Abstract: An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, a sensor unit, an electromagnetic valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts a flow rate setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a control module and a calculation module. The valve control circuit opens the electromagnetic valve according to the first control signal only, and further regulates an openness of the electromagnetic valve according to the first control signal and the second control signal. It is concluded that response time of the mass flow control apparatus of the present invention is shorten, and control quality is improved.

Abstract: An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, an output terminal, a sensor unit, a flow rate control valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts an actual setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a storage module, a setting signal calibration module and a calculation module. The valve control circuit generates, based on a control signal, an openness control signal, so as to control the flow rate control valve. It is concluded that the flow rate control quality is improved by the present invention.

Abstract: An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, a sensor unit, an electromagnetic valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts a flow rate setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a control module and a calculation module. The valve control circuit opens the electromagnetic valve according to the first control signal only, and further regulates an openness of the electromagnetic valve according to the first control signal and the second control signal. It is concluded that response time of the mass flow control apparatus of the present invention is shorten, and control quality is improved.

Abstract: The present invention provides a new type flow control system comprising a valve control circuit and a power source circuit. Two terminals of the primary coil of the power source circuit transformer are respectively connected with two power source circuit FETs, the secondary coil of the power source circuit transformer is connected to the voltage output terminal of the power source circuit through a power source rectification circuit. The gates of the power source circuit FETs are connected with a switching regulator. The AC input terminal of the valve control circuit is connected with a valve control circuit transformer. The primary coil of the valve control circuit transformer is connected with a valve control circuit FET, the secondary coil of the transformer is connected to a mechanical valve through a valve control rectification circuit. A microcontroller outputs PWM signals to the gate of the valve control circuit FET.

Abstract: A flow meter is disclosed, which composes an operational amplifier, a digital potentiometer, a sensor coil, and fixed resistors R1, R2 and R3. One end of the coil is connected to the non-inverting input terminal of the amplifier, the other end is grounded. The R1 is connected between the non-inverting input terminal and the output terminal of the amplifier, the inverting input terminal of the amplifier is connected to one end of R2 and R3, the other end of R2 is connected to the output terminal of the amplifier, and the other end of R3 is grounded. The connecting end of R2 and the output terminal of the amplifier is connected to the high side of the potentiometer, the grounded end of R3 is connected to the low side of the potentiometer, and the inverting input terminal of the amplifier is also connected to the sliding end of the potentiometer.

Abstract: The present invention provides a new type flow control system comprising a valve control circuit and a power source circuit. Two terminals of the primary coil of the power source circuit transformer are respectively connected with two power source circuit FETs, the secondary coil of the power source circuit transformer is connected to the voltage output terminal of the power source circuit through a power source rectification circuit. The gates of the power source circuit FETs are connected with a switching regulator. The AC input terminal of the valve control circuit is connected with a valve control circuit transformer. The primary coil of the valve control circuit transformer is connected with a valve control circuit FET, the secondary coil of the transformer is connected to a mechanical valve through a valve control rectification circuit. A microcontroller outputs PWM signals to the gate of the valve control circuit FET.

Abstract: A flow meter is disclosed, which composes an operational amplifier, a digital potentiometer, a sensor coil, and fixed resistors R1, R2 and R3. One end of the coil is connected to the non-inverting input terminal of the amplifier, the other end is grounded. The R1 is connected between the non-inverting input terminal and the output terminal of the amplifier, the inverting input terminal of the amplifier is connected to one end of R2 and R3, the other end of R2 is connected to the output terminal of the amplifier, and the other end of R3 is grounded. The connecting end of R2 and the output terminal of the amplifier is connected to the high side of the potentiometer, the grounded end of R3 is connected to the low side of the potentiometer, and the inverting input terminal of the amplifier is also connected to the sliding end of the potentiometer.