Abstract: A substrate fixing carrier includes a supporting frame and a cooling plate. The supporting frame defines a hollow region and a supporting portion at an inner wall of the supporting frame. The cooling plate and the supporting frame are movable towards each other until the cooling plate is in the hollow region with edges of the cooling plate aligning with the supporting portion. When a rectangular to-be-evaporated substrate is placed in the hollow region with edges of the rectangular to-be-evaporated substrate between the supporting portion and the cooling plate, a distance between each edge of the cooling plate corresponding to each long side of the to-be-evaporated substrate and the supporting portion is greater than or equal to a thickness of the to-be-evaporated substrate, and a distance between each edge of the cooling plate corresponding to each short side of the to-be-evaporated substrate and the supporting portion is less than the thickness of the to-be-evaporated substrate.

Abstract: A substrate fixing carrier includes a supporting frame and a cooling plate. The supporting frame defines a hollow region and a supporting portion at an inner wall of the supporting frame. The cooling plate and the supporting frame are movable towards each other until the cooling plate is in the hollow region with edges of the cooling plate aligning with the supporting portion. When a rectangular to-be-evaporated substrate is placed in the hollow region with edges of the rectangular to-be-evaporated substrate between the supporting portion and the cooling plate, a distance between each edge of the cooling plate corresponding to each long side of the to-be-evaporated substrate and the supporting portion is greater than or equal to a thickness of the to-be-evaporated substrate, and a distance between each edge of the cooling plate corresponding to each short side of the to-be-evaporated substrate and the supporting portion is less than the thickness of the to-be-evaporated substrate.

Abstract: A method of assisted mounting and error compensation for absolute grating ruler comprises: (1) when mounting a CMOS sensor and a grating ruler body, the CMOS sensor reads an upper and a lower sample windows, and due to an angle existing between the grating ruler body and the CMOS sensor, a difference exists between the numbers of the upper and lower sample windows, and by continually adjusting the grating ruler body or the CMOS sensor, the code reading difference minimized so that the angle is zeroed; (2) when mounting the grating ruler body and a mechanic housing, it is moved by a fixed displacement in a motion direction, and a grating encoding reading is recorded and an error compensating amount is obtained which serves as error compensation value in an actual motion to correct a cumulative error introduced by the angle between the grating ruler body and the motion direction.

Abstract: The present invention is a method of assisted mounting and error compensation for absolute grating ruler. It comprises the following: (1) when mounting a CMOS sensor and a grating ruler body, the CMOS sensor reads an upper and a lower sample windows, and due to an angle existing between the grating ruler body and the CMOS sensor, a difference exists between the numbers of the upper and lower sample windows, and by continually adjusting the grating ruler body or the CMOS sensor, the code reading difference is made minimal so that the angle existing between the grating ruler body and the CMOS sensor is zeroed; (2) when mounting the grating ruler body and a mechanic housing, it is moved by a fixed displacement in a motion direction, and a grating encoding reading is recorded and an error compensating amount is obtained which serves as error compensation value in an actual motion to correct a cumulative error introduced by the angle between the grating ruler body and the motion direction.