Patents by Inventor Charles Anthony Schneider

Charles Anthony Schneider has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Partial clean fluorine thermal cleaning process
    Patent number: 5868852
    Abstract: A method for the dynamic cleaning of semiconductor fabrication equipment and particularly quartzware with a thermally activated source of fluorine, such as nitrogen trifluoride, at an elevated temperature, typically at the process operation temperature, wherein the cleaning is terminated prior to complete cleaning and removal of undesired substances allowing rapid restart of fabrication equipment so cleaned.
    Type: Grant
    Filed: February 18, 1997
    Date of Patent: February 9, 1999
    Assignees: Air Products and Chemicals, Inc., Aspect Systems, Inc.
    Inventors: Andrew David Johnson, Richard Vincent Pearce, Charles Anthony Schneider, Timothy Wayne McGaughey
  • Nitrogen trifluoride thermal cleaning apparatus and process
    Patent number: 5797195
    Abstract: The present invention is a method and apparatus for the dynamic cleaning of semiconductor fabrication equipment and particularly quartzware with thermally activated nitrogen trifluoride wherein the cleaning effluent is safely removed and cleaning by-products isolated or diluted to provide for efficient cleaning and rapid restarts of fabrication equipment so cleaned.
    Type: Grant
    Filed: February 17, 1995
    Date of Patent: August 25, 1998
    Assignees: Air Products and Chemicals, Inc., GEC, Inc.
    Inventors: Bruce Alan Huling, Charles Anthony Schneider, George Martin Engle
  • Diluted nitrogen trifluoride thermal cleaning process
    Patent number: 5714011
    Abstract: A method for the dynamic cleaning of semiconductor fabrication equipment and particularly quartzware with thermally activated diluted nitrogen trifluoride at elevated temperatures, typically at the process operation temperature, wherein the cleaning effluent is safely removed and cleaning by-products isolated or diluted to provide for efficient cleaning and rapid restarts of fabrication equipment so cleaned.
    Type: Grant
    Filed: February 17, 1995
    Date of Patent: February 3, 1998
    Assignees: Air Products and Chemicals Inc., Aspect Systems Inc., GEC Inc.
    Inventors: Charles Anthony Schneider, Ronald James Gibson, Bruce Alan Huling, George Martin Engle