Patents by Inventor Charles H. Perry

Charles H. Perry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for providing pinhole free dielectric layers
    Patent number: 4519851
    Abstract: A method is taught for repairing pinholes in dielectric layers and thereby avoiding metal shorts. The method is applied after the dielectric has been deposited on a base of conductive metallurgy and involves heating the metal-dielectric layers in an oxygen ambient and thereby oxidizing any exposed metal. The metal-oxide formed in the pinhole effectively insulates the underlying metal from a subsequently deposited metal; and, hence acts to prevent metal-to-metal shorts.
    Type: Grant
    Filed: June 15, 1984
    Date of Patent: May 28, 1985
    Assignee: International Business Machines Corporation
    Inventors: Charles H. Perry, Robert R. Shaw