Abstract: Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.

Abstract: Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.

Abstract: Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.

Abstract: Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.

Abstract: A boat tunnel system apparatus and method for providing shallow operation of a boat when utilizing standard outboard motors. A convex tunnel having a forward end, a convex center section, and a rearward end that exits the stern of a boat above the water line ensures that water adheres to the convex tunnel as the boat moves forward through the water thereby causing water to exit the stern of the boat above the normal water line. As the boat gains speed, water exits higher and higher above the normal water line and, in conjunction with the convex tunnel, a movable motor with propeller attached can be lifted into the solid water stream exiting the stern of the boat. As the boat reaches a plane position, a solid stream of water is provided so far above the normal water line of the boat that the propeller and water intakes of a motor can be raised above the water line and, in fact, raised above the hull of the boat.

Abstract: A slag handling apparatus and method are disclosed wherein slag is received at an elevated temperature of about 3000.degree. F. and an elevated pressure of about 450 pounds per square inch and is handled so that it may be transported at atmospheric pressures and low temperatures of the order of 100.degree.-200.degree. F. The slag is sequentially fractured and ground by a grinder while descending downwardly through a column of water in a series of vessels.