Abstract: An electron energy analyzer integrated with a low-pass energy filter. The electron energy analyzer includes a separation region disposed inside a coil creating a magnetic field parallel to an axis of the separation region. The magnetic field is terminated at both ends of the separation region and shunted by a magnetic yoke around the outside of the coil. Electrons entering the separation region at a polar angle with respect to the axis accumulate an azimuthal angle dependent on the energy of the electron. Thereby, the direction the electron is traveling when it exits the separation angle depends upon its energy. According to the invention, a low-pass reflector is positioned at the input side of the analyzer, for example, a grounded grid in back of which is positioned a negatively biased absorption electrode. Electrons having energy exceeding the electrode bias are absorbed. Electrons having energy less than the electrode bias are reflected and exit the reflector with the same energy as before.

Abstract: A transfer arm assembly for transferring wafers between a load-lock chamber or a transfer chamber and processing chamber. The wafer is selectively held on the end of a paddle. Linear horizontal motion is provided by a drawer-slide mechanism including a base, a carriage, and the paddle. Slides are mounted on the base and on the carriage. Wheels mounted on the carriage slidably engage the base slides and support the carriage on the base, and wheels mounted on the paddle slidably engage the carriage slides and support the paddle on the carriage. Thereby, the paddle may be projected a distance greater than the lateral extent of the base or of the vacuum chamber accommodating the base and its supported components in their retracted positions. A single motor mounted on the carriage can provide the two relative motions among the base, carriage, and paddle by means of two belt mechanisms wrapped around two capstans attached to the motor shaft.