Abstract: A method for defect inspection of a transparent substrate comprises utilizing a wavefront reconstruction unit to obtain complex defect diffraction wavefront of a transparent substrate; using a complex defect diffraction module to confirm the effective diffraction distance of the complex defect diffraction wavefront; utilizing a defect detection module to detect position of the defect of the transparent substrate; using a defect classification module to perform extraction, analysis and classification of diffraction characteristics and utilizing a machine learning algorithm or a deep learning algorithm to automatically identify the defects.

Abstract: A method for defect inspection of a transparent substrate comprises (a) providing an optical system for performing a diffraction process of object wave passing through a transparent substrate, (b) interfering and wavefront recording for the diffracted object wave and a reference wave to reconstruct the defect complex images (including amplitude and phase) of the transparent substrate, (c) characteristics analyzing, features classifying and sieving for the defect complex images of the transparent substrate, and (d) creating defect complex images database based-on the defect complex images for comparison and detection of the defect complex images of the transparent substrate.

Abstract: A method of structured illumination digital holography includes: (a) providing a structured illumination generating unit and binarization random number encoding unit to generate a coded structured illumination pattern; (b) sampling at least two patterns with phase shift which synthesized as a single structured illumination pattern to be encoded; (c) forming a single digital hologram, and wavefront reconstructing the single digital hologram; (d) performing a compressive sensing approach to recover the object wave with at least two phase shift patterns; and (e) reconstructing the separation of overlap spectrum, to obtain an image covering bandpass spectrum with different high frequency and low frequency.

Abstract: A method for defect inspection of a transparent substrate comprises utilizing a wavefront reconstruction unit to obtain complex defect diffraction wavefront of a transparent substrate; using a complex defect diffraction module to confirm the effective diffraction distance of the complex defect diffraction wavefront; utilizing a defect detection module to detect position of the defect of the transparent substrate; using a defect classification module to perform extraction, analysis and classification of diffraction characteristics and utilizing a machine learning algorithm or a deep learning algorithm to automatically identify the defects.

Abstract: A method for ultrafast time-resolved digital holography comprises (a) providing tunable timescale at least two tick-tock pulses arriving on a sample to be measured at various timescales, (b) spatial encoding for wavefronts of the sample by utilizing at least one optical encoder, (c) utilizing a digital holographic access unit to record a composite hologram of the spatial encoded wavefronts by the same single pulse source, (d) utilizing an encoder for obtaining at least two holograms, and (e) utilizing a compressive sensing approach or a non-linear image restoration approach and a wavefront reconstruction approach to obtain the reconstructed wavefronts information of the sample.

Abstract: A method for digital holographic microtomography comprises (a) providing at least one wavefront controlling device for driving a sample to be rotated and/or an incident beam scanning the sample, (b) utilizing a digital holographic access unit for recording the transmitted or reflected wavefronts of the sample, (c) utilizing a digital holography reconstructing method for reconstructing the transmitted or reflected wavefronts of the sample, and (d) utilizing a tomographic reconstruction approach for reconstructing three dimensional image information of the sample.

Abstract: A method of structured illumination digital holography includes: (a) providing a structured illumination generating unit and binarization random number encoding unit to generate a coded structured illumination pattern; (b) sampling at least two patterns with phase shift which synthesized as a single structured illumination pattern to be encoded; (c) forming a single digital hologram, and wavefront reconstructing the single digital hologram; (d) performing a compressive sensing approach to recover the object wave with at least two phase shift patterns; and (e) reconstructing the separation of overlap spectrum, to obtain an image covering bandpass spectrum with different high frequency and low frequency.

Abstract: A method for ultrafast time-resolved digital holography comprises (a) providing tunable timescale at least two tick-tock pulses arriving on a sample to be measured at various timescales, (b) spatial encoding for wavefronts of the sample by utilizing at least one optical encoder, (c) utilizing a digital holographic access unit to record a composite hologram of the spatial encoded wavefronts by the same single pulse source, (d) utilizing an encoder for obtaining at least two holograms, and (e) utilizing a compressive sensing approach or a non-linear image restoration approach and a wavefront reconstruction approach to obtain the reconstructed wavefronts information of the sample.

Abstract: A method for digital holographic microtomography comprises (a) providing at least one wavefront controlling device for driving a sample to be rotated and/or an incident beam scanning the sample, (b) utilizing a digital holographic access unit for recording the transmitted or reflected wavefronts of the sample, (c) utilizing a digital holography reconstructing method for reconstructing the transmitted or reflected wavefronts of the sample, and (d) utilizing a tomographic reconstruction approach for reconstructing three dimensional image information of the sample.

Abstract: An image processing method for processing a plurality of holograms includes the steps of: performing a Fourier transform operation on the holograms to result in a plurality of corresponding spectra in a spectrum space; calculating a sum of the plurality of spectra to obtain the synthetic spectrum; multiplying the synthetic spectrum by a weight function associated with the spectrum space to obtain a normalized synthetic spectrum, each function value of the weight function corresponding to a respective position in the spectrum space and being associated with distribution of the plurality of spectra in the spectrum space; and performing the inverse Fourier transform operation on the normalized synthetic spectrum to result in a normalized synthetic hologram.

Abstract: A method for defect inspection of a transparent substrate comprises (a) providing an optical system for performing a diffraction process of object wave passing through a transparent substrate, (b) interfering and wavefront recording for the diffracted object wave and a reference wave to reconstruct the defect complex images (including amplitude and phase) of the transparent substrate, (c) characteristics analyzing, features classifying and sieving for the defect complex images of the transparent substrate, and (d) creating defect complex images database based-on the defect complex images for comparison and detection of the defect complex images of the transparent substrate.

Abstract: A system for measuring the profile or the refractive index of a transparent object by fringe projection techniques is provided and has an image generating device, an image capture device, and an image processor. The image generating device produces a reference image with a long depth of focus. This reference image is emitted into an inspected transparent object, and is distorted by the refractive index and the profile of the transparent object. The image capture device receives the distorted image. The image processor analyzes the difference between the distorted image and the reference image, so as to identify the profile or the refractive index of the inspected transparent object.

Abstract: An image processing method for processing a plurality of holograms includes the steps of: performing a Fourier transform operation on the holograms to result in a plurality of corresponding spectra in a spectrum space; calculating a sum of the plurality of spectra to obtain the synthetic spectrum; multiplying the synthetic spectrum by a weight function associated with the spectrum space to obtain a normalized synthetic spectrum, each function value of the weight function corresponding to a respective position in the spectrum space and being associated with distribution of the plurality of spectra in the spectrum space; and performing the inverse Fourier transform operation on the normalized synthetic spectrum to result in a normalized synthetic hologram.

Abstract: A system for measuring the profile or the refractive index of a transparent object by fringe projection techniques is provided and has an image generating device, an image capture device, and an image processor. The image generating device produces a reference image with a long depth of focus. This reference image is emitted into an inspected transparent object, and is distorted by the refractive index and the profile of the transparent object. The image capture device receives the distorted image. The image processor analyzes the difference between the distorted image and the reference image, so as to identify the profile or the refractive index of the inspected transparent object.