Abstract: A Standard Mechanical Inter Face is described where a sensor causes a fan in a fan filter unit, attached to a Standard Mechanical Inter Face, to be turned on or off depending on the position of the door in semiconductor wafer equipment. An apparatus for realizing this and a method for its use are given. Two examples of sensors for realizing this invention are described. A preferred embodiment of the invention is the use of an infrared sensor placed within the Standard Mechanical Inter Face and containing an infrared transmitter and infrared receiver in one housing.

Abstract: A mobile work-in-process parts tracking system includes a vehicle for transporting the work-in-process parts stored in containers, a tag mounted on the container and a tag reader mounted on the vehicle for reading the tag and outputting data to a data concentrator which accepts data from a plurality of tag readers and then outputting data in a single cable by removably connecting to a data distributor mounted in the factory floor, such that the location of the WIP parts transported on the vehicle can be tracked and monitored.

Abstract: The present invention is a method and apparatus for conveying an article on a loading platform of a vehicle by installing sensor switches on the top surface of the loading platform so that the proper loading of an article on the vehicle can be monitored and ensured in such a way that the movement of the vehicle can be stopped when the sensor switches sense an improper positioning of the article.

Abstract: A transportable apparatus, or a pod carrier, is disclosed in conjunction with a standardized mechanical interface system (SMIF) whereby the tracking of transported articles is made easier and more reliable. This is accomplished by affixing a card-holder to the pod carrier. The card-holder can hold the process run-cards snugly, or otherwise, at all times in such a way that the cards are visible and amenable to expeditious processing. It is shown that by extending the function of a pod carrier to a tracking device as well, the probability of lost run-cards and the concomitant lost time in the manufacturing line, and/or missteps in the processing of parts are reduced.

Abstract: This method provides for increasing integrated circuit production of a fabrication facility comprising collecting data from a plurality of machines, calculating of the present Ratio of Running Work (RRW), comparing present RRW to optimum RRW, checking the system to determine which machines are idle, and taking steps to increase the number of running machines. Steps taken to decrease the number of idle machines include dispatching commands to a computerized dispatching system or operators. The steps of the process are repeated to further increase RRW.