Patents by Inventor Cheng-Fang Chung

Cheng-Fang Chung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for cooling a semiconductor substrate
    Patent number: 6920915
    Abstract: A cooling stage for a semiconductor substrate and a method for utilizing such cooling stage for cooling of a semiconductor substrate. In the cooling stage, a pedestal that has a substantially planar top surface is equipped with a first plurality of circular grooves concentrically formed in the top surface and a second plurality of linear grooves formed in radial directions emanating from a center of the top surface in fluid communication with the first plurality of circular grooves to allow a cooling fluid to flow therethrough when a semiconductor substrate is positioned on the top surface of the stage.
    Type: Grant
    Filed: October 2, 1999
    Date of Patent: July 26, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Ching-Hsing Shih, His-Shen Chuang, Cheng-Fang Chung