Patents by Inventor Cheng Mu Yuan

Cheng Mu Yuan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for controlling the operation of a scrubber
    Patent number: 6926756
    Abstract: A method and system to control the operation of a scrubber, in which, the system includes a valve to control the flow of an exhaust from a tool, a sensor to determine whether the valve is open or closed and a controller to control the operation of the scrubber depending on whether the valve is open or closed.
    Type: Grant
    Filed: March 31, 2003
    Date of Patent: August 9, 2005
    Assignee: Macronix International Co. Ltd.
    Inventors: Cheng Mu Yuan, Hour Chin Di