Patents by Inventor Cheng-Tsiung Tsai

Cheng-Tsiung Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Detachable electrostatic chuck having sealing assembly
    Patent number: 7589950
    Abstract: A detachable electrostatic chuck is capable of being attached to a pedestal in a process chamber. The chuck comprises an electrostatic puck having a ceramic body with an embedded electrode. The chuck also has a baseplate below the electrostatic puck with a lower surface which is bonded to a sealing assembly comprising a sealing plate and sealing ring. The sealing plate and ring are polished to form a gas-tight seal between the chuck and pedestal to prevent gas leakage from or into this region.
    Type: Grant
    Filed: October 13, 2006
    Date of Patent: September 15, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Vijay D. Parkhe, Cheng-Tsiung Tsai, Steven V. Sansoni
  • Detachable electrostatic chuck having sealing assembly
    Publication number: 20080089001
    Abstract: A detachable electrostatic chuck is capable of being attached to a pedestal in a process chamber. The chuck comprises an electrostatic puck having a ceramic body with an embedded electrode. The chuck also has a baseplate below the electrostatic puck with a lower surface which is bonded to a sealing assembly comprising a sealing plate and sealing ring. The sealing plate and ring are polished to form a gas-tight seal between the chuck and pedestal to prevent gas leakage from or into this region.
    Type: Application
    Filed: October 13, 2006
    Publication date: April 17, 2008
    Inventors: Vijay D. Parkhe, Cheng-Tsiung Tsai, Steven V. Sansoni