Patents by Inventor Cheryl A. Bollinger

Cheryl A. Bollinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making multilayered Al-alloy structure for metal conductors
    Patent number: 5561083
    Abstract: A Si IC includes an Al-based layer which is deposited as a composite of sublayers of different composition Al-based materials. In one embodiment a first sublayer comprises an Al-Si-based alloy disposed so as to prevent substantial Si migration into the first sublayer, and a second sublayer, above the first, comprises an Al-based alloy with substantially no Si to alleviate precipitation-induced problems. The selection of the thickness of the second sublayer to be a major portion and the inclusion of barrier layers are also described.
    Type: Grant
    Filed: December 29, 1994
    Date of Patent: October 1, 1996
    Assignee: Lucent Technologies Inc.
    Inventors: Cheryl A. Bollinger, Edward A. Dein, Sailesh M. Merchant, Arun K. Nanda, Pradip K. Roy, Cletus W. Wilkins, Jr.
  • Integrated circuit with planar dielectric layer
    Patent number: 5200358
    Abstract: Self-aligned contacts are formed to regions between closely spaced features by a method which uses differential etch rates between first and second dielectrics deposited over the closely spaced features.
    Type: Grant
    Filed: November 15, 1991
    Date of Patent: April 6, 1993
    Assignee: AT&T Bell Laboratories
    Inventors: Cheryl A. Bollinger, Min-Liang Chen, David P. Favreau, Kurt G. Steiner, Daniel J. Vitkavage