Patents by Inventor Chetan Suresh

Chetan Suresh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection of substrates
    Patent number: 10553504
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: February 4, 2020
    Assignee: Rudolph Technologies, Inc.
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • Semiconductor device inspection of metallic discontinuities
    Patent number: 10466179
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: November 5, 2019
    Assignee: Rudoplh Technologies, Inc.
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • SEMICONDUCTOR DEVICE INSPECTION OF METALLIC DISCONTINUITIES
    Publication number: 20180275063
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Application
    Filed: March 22, 2018
    Publication date: September 27, 2018
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • INSPECTION OF SUBSTRATES
    Publication number: 20180277452
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Application
    Filed: March 22, 2018
    Publication date: September 27, 2018
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • Substrate handler
    Patent number: 9437467
    Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
    Type: Grant
    Filed: April 15, 2014
    Date of Patent: September 6, 2016
    Assignee: Rudolph Technologies, Inc.
    Inventors: Troy Palm, Kevin J. Barr, Ralph P. Sowden, Matthew M. Laberge, Andrey Monjoseph, Brian Delsey, Emily Nordick, Richard Sobotka, Chetan Suresh
  • SUBSTRATE HANDLER
    Publication number: 20140314535
    Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
    Type: Application
    Filed: April 15, 2014
    Publication date: October 23, 2014
    Applicant: Rudolph Technologies, Inc.
    Inventors: Troy Palm, Kevin J. Barr, Ralph P. Sowden, Matthew M. Laberge, Andrey Monjoseph, Brian Delsey, Emily Nordick, Richard Sobotka, Chetan Suresh
  • Substrate handler
    Patent number: 8698327
    Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
    Type: Grant
    Filed: January 17, 2012
    Date of Patent: April 15, 2014
    Assignee: Rudolph Technologies, Inc.
    Inventors: Troy Palm, Kevin J. Barr, Ralph P. Sowden, Matthew M. Laberge, Andrey MonJoseph, Brian Delsey, Emily Nordick, Richard Sobotka, Chetan Suresh
  • SUBSTRATE HANDLER
    Publication number: 20120257952
    Abstract: A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
    Type: Application
    Filed: January 17, 2012
    Publication date: October 11, 2012
    Applicant: Rudolph Technologies, Inc.
    Inventors: Troy Palm, Kevin J. Barr, Ralph P. Sowden, Matthew M. Laberge, Andrey MonJoseph, Brian Delsey, Emily Nordick, Richard Sobotka, Chetan Suresh