Patents by Inventor Chettypalayam R. Selvakumar

Chettypalayam R. Selvakumar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for making silicon-germanium devices using germanium implantation
    Patent number: 5426069
    Abstract: Silicon-germanium devices including MOSFETs, photogates and photodiodes, are produced by implanting the Si or polycrystalline silicon substrate with Ge.sup.+, to realize active SiGe regions within Si which are substantially free from defects, at an appropriate point in the fabrication by conventional techniques.
    Type: Grant
    Filed: April 9, 1992
    Date of Patent: June 20, 1995
    Assignee: Dalsa Inc.
    Inventors: Chettypalayam R. Selvakumar, Savvas G. Chamberlain