Abstract: Integrated circuit interconnect structures including an interconnect metallization feature with a liner material of a greater thickness between a fill metal and dielectric material, and of a lesser thickness between the fill metal and a lower-level interconnect metallization feature. The liner material may be substantially absent from an interface between the fill metal and the lower-level interconnect metallization feature. Liner material of reduced thickness at a bottom of the via may reduce via resistance and/or facilitate the use of a highly resistive liner material that may enhance the scalability of interconnect structures. In some embodiments, liner material is deposited upon dielectric surfaces with an area selective atomic layer deposition process. For single damascene implementations, both a via and a metal line may include a selectively deposited liner material.

Abstract: Metal insulator metal capacitors are described. In an example, a capacitor includes a first electrode plate, and a first capacitor dielectric on the first electrode plate. A second electrode plate is on the first capacitor dielectric and is over and parallel with the first electrode plate, and a second capacitor dielectric is on the second electrode plate. A third electrode plate is on the second capacitor dielectric and is over and parallel with the second electrode plate, and a third capacitor dielectric is on the third electrode plate. A fourth electrode plate is on the third capacitor dielectric and is over and parallel with the third electrode plate. In another example, a capacitor includes a first electrode, a capacitor dielectric on the first electrode, and a second electrode on the capacitor dielectric. The capacitor dielectric includes a plurality of alternating first dielectric layers and second dielectric layers.

Abstract: An integrated circuit capacitor structure, includes a first electrode includes a cylindrical column, a ferroelectric layer around an exterior sidewall of the cylindrical column and a plurality of outer electrodes. The plurality of outer electrodes include a first outer electrode laterally adjacent to a first portion of an exterior of the ferroelectric layer and a second outer electrode laterally adjacent to a second portion of the exterior of the ferroelectric layer, wherein the second outer electrode is above the first outer electrode.

Abstract: The present invention provides a waveguide coupler configured to optically couple a strip waveguide to a first slot photonic crystal waveguide, wherein the slot photonic crystal waveguide has a lattice constant, an air hole diameter, a slot width and a first line defect waveguide width. The waveguide coupler includes a group reflective index taper having a second slot photonic crystal waveguide disposed between and aligned with the first slot photonic crystal waveguide and the strip waveguide. The second slot photonic crystal waveguide has a length, the lattice constant, the air hole diameter, the slot width, and a second line defect waveguide width that is substantially equal to the first line defect waveguide width adjacent to the first slot photonic crystal waveguide and decreases along the length of the second photonic crystal waveguide.

Abstract: The present invention provides a waveguide coupler configured to optically couple a strip waveguide to a first slot photonic crystal waveguide, wherein the slot photonic crystal waveguide has a lattice constant, an air hole diameter, a slot width and a first line defect waveguide width. The waveguide coupler includes a group reflective index taper having a second slot photonic crystal waveguide disposed between and aligned with the first slot photonic crystal waveguide and the strip waveguide. The second slot photonic crystal waveguide has a length, the lattice constant, the air hole diameter, the slot width, and a second line defect waveguide width that is substantially equal to the first line defect waveguide width adjacent to the first slot photonic crystal waveguide and decreases along the length of the second photonic crystal waveguide.