Patents by Inventor CHI-CHIEH PENG

CHI-CHIEH PENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for metal gate surface clean
    Patent number: 11996283
    Abstract: The present disclosure provides a method for forming an integrated circuit (IC) structure. The method includes providing a metal gate (MG), an etch stop layer (ESL) formed on the MG, and a dielectric layer formed on the ESL. The method further includes etching the ESL and the dielectric layer to form a trench. A surface of the MG exposed in the trench is oxidized to form a first oxide layer on the MG. The method further includes removing the first oxide layer using a H3PO4 solution.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: May 28, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen
  • Embedded system, fool-proof control method and non-transitory computer-readable storage medium
    Patent number: 9465382
    Abstract: An embedded system is disclosed. The embedded system is used for preventing a processing machine from an abnormal phenomenon when at least one processing parameter setting value is inputted into the processing machine. The embedded system is electrically connected to the processing machine, and the processing machine comprises an input interface, a first storing medium, a first controller and a stepper motor. The embedded system comprises a second storing medium and a second controller. The second controller captures the a processing parameter setting value inputted and compares it with a security range, so as to determine whether the processing machine is able to perform process for a workpiece. When the second controller determines that the processing machine is not able to perform process for the workpiece, a stop signal is generated and transmitted to the processing machine to stop performing process for the workpiece.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: October 11, 2016
    Assignee: INSTITUTE FOR INFORMATION INDUSTRY
    Inventors: Chun-Tai Yen, Chih-Chiang Kao, Chi-Chieh Peng, Heng Lin, Hung-An Kao
  • EMBEDDED SYSTEM, FOOL-PROOF CONTROL METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
    Publication number: 20150148922
    Abstract: An embedded system is disclosed. The embedded system is used for preventing a processing machine from an abnormal phenomenon when at least one processing parameter setting value is inputted into the processing machine. The embedded system is electrically connected to the processing machine, and the processing machine comprises an input interface, a first storing medium, a first controller and a stepper motor. The embedded system comprises a second storing medium and a second controller. The second controller captures the a processing parameter setting value inputted and compares it with a security range, so as to determine whether the processing machine is able to perform process for a workpiece. When the second controller determines that the processing machine is not able to perform process for the workpiece, a stop signal is generated and transmitted to the processing machine to stop performing process for the workpiece.
    Type: Application
    Filed: December 19, 2013
    Publication date: May 28, 2015
    Applicant: INSTITUTE FOR INFORMATION INDUSTRY
    Inventors: CHUN-TAI YEN, CHIH- CHIANG KAO, CHI-CHIEH PENG, HENG LIN, HUNG-AN KAO