Patents by Inventor Chi-Tso Huang

Chi-Tso Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5158906
    Abstract: The centrifugally tensional, horizontally recrystallizing process for forming the dielectric isolated semiconductor starting wafer materials is described. Wafer with oxide and deposited polycrystalline silicon film, is put on top of a horizontal rotating stage, and secured by vacuum. Recrystallization of the polycrystalline film into single crystalline is carried out by concentric heating elements located directly above and aligned concentrically with the spinning wafer. The recrystallization will proceed from the center of the wafer radially outward into the film area that covers the whole wafer.
    Type: Grant
    Filed: June 13, 1991
    Date of Patent: October 27, 1992
    Inventor: Chi-Tso Huang