Patents by Inventor Chi-Yu Lu

Chi-Yu Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220382957
    Abstract: A system for generating a layout diagram of a wire routing arrangement in a multi-patterning context having multiple masks (the layout diagram being stored on a non-transitory computer-readable medium), at least one processor, at least one memory and computer program code (for one or more programs) of the system being configured to cause the system to execute generating the layout diagram including: placing, relative to a given one of the masks, a given cut pattern at a first candidate location over a corresponding portion of a given conductive pattern in a metallization layer; determining whether the first candidate location results in at least one of a non-circular group or a cyclic group which violates a design rule; and temporarily preventing placement of the given cut pattern in the metallization layer at the first candidate location until a correction is made which avoids violating the design rule.
    Type: Application
    Filed: August 10, 2022
    Publication date: December 1, 2022
    Inventors: Fong-Yuan CHANG, Chin-Chou LIU, Hui-Zhong ZHUANG, Meng-Kai HSU, Pin-Dai SUE, Po-Hsiang HUANG, Yi-Kan CHENG, Chi-Yu LU, Jung-Chou TSAI
  • Publication number: 20220382951
    Abstract: A method of fabricating an integrated circuit includes placing a first set of conductive feature patterns on a first level, placing a second set of conductive feature patterns on a second level, placing a first set of via patterns between the second set of conductive feature patterns and the first set of conductive feature patterns, placing a third set of conductive feature patterns on a third level different from the first level and the second level, placing a second set of via patterns between the third set of conductive feature patterns and the second set of conductive feature patterns, and manufacturing the integrated circuit based on at least one of the above patterns of the integrated circuit.
    Type: Application
    Filed: August 10, 2022
    Publication date: December 1, 2022
    Inventors: Jung-Chan YANG, Ting-Wei CHIANG, Jerry Chang-Jui KAO, Hui-Zhong ZHUANG, Lee-Chung LU, Li-Chun TIEN, Meng-Hung SHEN, Shang-Chih HSIEH, Chi-Yu LU
  • Publication number: 20220367519
    Abstract: A method is provided, and including operations as below: forming multiple active areas extending in a first direction; forming multiple conductive patterns extending in a second direction different from the first direction and arranged in a first layer above the active areas; forming multiple gates extending parallel to the conductive patterns; and forming a first set of conductive lines extending in the first direction and arranged in three first metal tracks that are in a second layer above the first layer, wherein one of the first set of conductive lines is arranged in a middle track of the three first metal tracks, coupled to one of the gates and overlap a first shallow trench region between two of the active areas.
    Type: Application
    Filed: July 27, 2022
    Publication date: November 17, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Guo-Huei WU, Chi-Yu LU, Ting-Yu CHEN, Li-Chun TIEN
  • Publication number: 20220359392
    Abstract: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a first conductive pattern on a substrate, a second conductive pattern above the first conductive pattern, and a third conductive pattern above the first conductive pattern, all extending along a first direction. The first conductive pattern is electrically connected in parallel to the second conductive pattern and the third conductive pattern.
    Type: Application
    Filed: July 29, 2021
    Publication date: November 10, 2022
    Inventors: Fei Fan DUAN, Fong-yuan CHANG, Chi-Yu LU, Po-Hsiang HUANG, Chih-Liang CHEN
  • Publication number: 20220359508
    Abstract: A method of making an integrated circuit includes steps of selecting a first cell and a second cell for an integrated circuit layout from a cell library in an electronic design automation (EDA) system, the first and second cells each having a cell active area, a cell gate electrode, at least one fin of a first set of fins, and a cell border region, each cell also having the active area at an exposed side, and placing the first exposed side against the second exposed side at a cell border. The method also includes operations of aligning at least one fin of the first set of fins with at least one fin of the second set of fins across a cell border.
    Type: Application
    Filed: July 22, 2022
    Publication date: November 10, 2022
    Inventors: Pin-Dai SUE, Ting-Wei CHIANG, Hui-Zhong ZHUANG, Ya-Chi CHOU, Chi-Yu LU
  • Patent number: 11494543
    Abstract: A layout method comprises selecting a first and a second layout devices in a layout of an integrated circuit. The second layout device abuts the first layout device at a boundary therebetween. The layout method also comprises disposing a first and a second conductive paths across the boundary, and respectively disposing a first and a second cut layers on the first and second conductive paths nearby the boundary. The layout method also comprises disconnecting the first layout device from the second layout device by cutting the first conductive path into two conductive portions according to a first position of the first cut layer and cutting the second conductive path into two conductive portions a second position of the second cut layer. The layout method also comprises moving the first cut layer to align with the second cut layer.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: November 8, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Cheok-Kei Lei, Yu-Chi Li, Chia-Wei Tseng, Zhe-Wei Jiang, Chi-Lin Liu, Jerry Chang-Jui Kao, Jung-Chan Yang, Chi-Yu Lu, Hui-Zhong Zhuang
  • Publication number: 20220352072
    Abstract: The present disclosure, in some embodiments, relates to an integrated circuit. The integrated circuit includes first and second source/drain regions on or within a substrate. A first gate is arranged over the substrate between the first source/drain region and the second source/drain region. A first middle-end-of-the-line (MEOL) structure is arranged over the second source/drain region and a second MEOL structure is arranged over a third source/drain region. A conductive structure contacts the first MEOL structure and the second MEOL structure. A second gate is separated from the first gate by the second source/drain region. The conductive structure vertically and physically contacts a top surface of the second gate that is coupled to outermost sidewalls of the second gate. A plurality of conductive contacts are configured to electrically couple an interconnect wire and the first MEOL structure along one or more conductive paths extending through the conductive structure.
    Type: Application
    Filed: July 18, 2022
    Publication date: November 3, 2022
    Inventors: Ni-Wan Fan, Ting-Wei Chiang, Cheng-I Huang, Jung-Chan Yang, Hsiang-Jen Tseng, Lipen Yuan, Chi-Yu Lu
  • Publication number: 20220336325
    Abstract: A semiconductor device includes a substrate and a first transistor on a first side of the substrate. The semiconductor device further includes a first electrode contacting a first region of the first transistor. The semiconductor device further includes a spacer extending along a sidewall of the first transistor. The semiconductor device further includes a self-aligned interconnect structure (SIS) separated from at least a portion of the first electrode by the spacer, wherein the SIS extends through the substrate. The semiconductor device further includes a second electrode contacting a surface of the first electrode farthest from the substrate, wherein the second electrode directly contacts the SIS.
    Type: Application
    Filed: April 15, 2021
    Publication date: October 20, 2022
    Inventors: Chih-Yu LAI, Chih-Liang CHEN, Chi-Yu LU, Shang-Syuan CIOU, Hui-Zhong ZHUANG, Ching-Wei TSAI, Shang-Wen CHANG
  • Patent number: 11461528
    Abstract: An integrated circuit structure includes a first, a second and a third set of conductive structures and a first and a second set of vias. The first set of conductive structures extend in a first direction, and is located at a first level. The second set of conductive structures extends in a second direction, overlaps the first set of conductive structures, and is located at a second level. The first set of vias is between, and electrically couples the first and the second set of conductive structures. The third set of conductive structures extends in the first direction, overlaps the second set of conductive structures, covers a portion of the first set of conductive structures, and is located at a third level. The second set of vias is between, and electrically couples the second and the third set of conductive structures.
    Type: Grant
    Filed: June 22, 2020
    Date of Patent: October 4, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jung-Chan Yang, Ting-Wei Chiang, Jerry Chang-Jui Kao, Hui-Zhong Zhuang, Lee-Chung Lu, Li-Chun Tien, Meng-Hung Shen, Shang-Chih Hsieh, Chi-Yu Lu
  • Publication number: 20220310591
    Abstract: A semiconductor device includes a substrate and a first active region on a first side of the substrate. The semiconductor device further includes a first gate structure surrounding a first portion of the first active region. The semiconductor device further includes a second active region on a second side of the substrate, wherein the second side is opposite the first side. The semiconductor device further includes a second gate structure surrounding a first portion of the second active region. The semiconductor device further includes a gate via extending through the substrate, wherein the gate via directly connects to the first gate structure, and the gate via directly connects to the second gate structure.
    Type: Application
    Filed: March 26, 2021
    Publication date: September 29, 2022
    Inventors: Chih-Yu LAI, Chih-Liang CHEN, Chi-Yu LU, Shang-Syuan CIOU, Hui-Zhong ZHUANG, Ching-Wei TSAI, Shang-Wen CHANG
  • Patent number: 11437321
    Abstract: The present disclosure, in some embodiments, relates to an integrated circuit. The integrated circuit includes first and second source/drain regions within a substrate. A gate structure is over the substrate between the first and second source/drain regions. A middle-end-of-the-line (MEOL) structure is over the second source/drain region. The MEOL structure has a bottommost surface that continuously extends in a first direction from directly contacting a top of the second source/drain region to laterally past an outer edge of the second source/drain region. A conductive structure is on the MEOL structure. A second gate structure is separated from the gate structure by the second source/drain region. The conductive structure continuously extends in a second direction over the MEOL structure and past opposing sides of the second gate structure. A plurality of conductive contacts are configured to electrically couple an interconnect wire and the MEOL structure along through the conductive structure.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: September 6, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ni-Wan Fan, Ting-Wei Chiang, Cheng-I Huang, Jung-Chan Yang, Hsiang-Jen Tseng, Lipen Yuan, Chi-Yu Lu
  • Publication number: 20220114322
    Abstract: A method of designing a semiconductor device including the operations of analyzing a vertical abutment between a first standard cell block and a second cell block and, if a mismatch is identified between the first standard cell block and the second cell block initiating the selection of a first modified cell block that reduces the mismatch and a spacing between the first modified cell block and the second cell block, the first modified cell block comprising a first abutment region having a continuous active region arranged along a first axis parallel to an edge of the vertical abutment, and replacing the first standard cell block with the first modified cell block to obtain a first modified layout design and devices manufactured according to the method.
    Type: Application
    Filed: December 21, 2021
    Publication date: April 14, 2022
    Inventors: Chi-Yu LU, Hui-Zhong ZHUANG, Pin-Dai SUE, Yi-Hsin KO, Li-Chun TIEN
  • Publication number: 20220093646
    Abstract: An integrated circuit is disclosure. The integrated circuit includes a first pair of power rails, a set of conductive lines arranged in the first layer parallel to the first pair of power rails, a first set of active areas. The integrated circuit further includes a first gate arranged along the second direction, between the first pair of power rails, and crossing the first set of active areas in a layout view, wherein the first gate is configured to be shared by a first transistor of a first type and a second transistor of a second type; and a second gate and a third gate, in which the second gate is configured to be a control terminal of a third transistor, and the third gate is configured to be a control terminal of a fourth transistor which is coupled to the control terminal of the third transistor.
    Type: Application
    Filed: September 18, 2020
    Publication date: March 24, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Guo-Huei WU, Chi-Yu LU, Ting-Yu CHEN, Li-Chun TIEN
  • Patent number: 11281836
    Abstract: A semiconductor device includes active areas formed as predetermined shapes on a substrate. The device also includes a first structure having at least two contiguous rows including: at least one instance of the first row, and at least one instance of the second row. The device also includes the first structure being configured such that: each of the at least one instance of the first row in the first structure having a first width in the first direction; and each of the at least one instance of the second row in the first structure having a second width in the first direction, the second width being substantially different than the first width. The device also includes a second structure having an odd number of contiguous rows including: an even number of instances of the first row, and an odd number of instances of the second row.
    Type: Grant
    Filed: April 5, 2021
    Date of Patent: March 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Fong-Yuan Chang, Jyun-Hao Chang, Sheng-Hsiung Chen, Ho Che Yu, Lee-Chung Lu, Ni-Wan Fan, Po-Hsiang Huang, Chi-Yu Lu, Jeo-Yen Lee
  • Publication number: 20220068816
    Abstract: A semiconductor device including: an active region; first, second and third metal-to-drain/source (MD) contact structures which extend in a first direction and correspondingly overlap the active region; a via-to-via (V2V) rail which extends in a second direction perpendicular to the first direction, and overlaps the first, second and third MD contact structures; a first conductive segment which overlaps the V2V rail, is in a first metallization layer, and, relative to the second direction, overlaps each of the first, second and third MD contact structures; and a first via-to-MD (VD) structure between the first MD contact structure and the first conductive segment, the first VD structure electrically coupling the first conductive segment, the V2V rail and the first MD contact structure; wherein at least one of the second or third MD contact structures is electrically decoupled from the V2V rail.
    Type: Application
    Filed: April 1, 2021
    Publication date: March 3, 2022
    Inventors: Jung-Chan YANG, Chi-Yu LU, Hui-Zhong ZHUANG, Chih-Liang CHEN
  • Patent number: 11216608
    Abstract: A semiconductor device comprising at least one modified cell block that includes a modified abutment region in which is provided a first continuous active region arranged along a first axis parallel to a vertical abutment edge for positioning adjacent other cell blocks to form a vertical abutment, including non-standard, standard, and modified cell blocks. The structure provided within the modified abutment region improves a structural and device density match between the modified cell block and the adjacent cell block, thereby reducing the need for white space between vertically adjacent cell blocks and reducing the total device area and increasing cell density.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: January 4, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Yu Lu, Hui-Zhong Zhuang, Li-Chun Tien, Pin-Dai Sue, Yi-Hsin Ko
  • Patent number: 11205531
    Abstract: The present invention provides a structure of resistor element, which comprises a protective layer around electrodes to elongate the path of corrosion when gaseous water or sulfur leaking in. Therefore, the protective layer structure can elongate the life of the resistor element.
    Type: Grant
    Filed: July 15, 2020
    Date of Patent: December 21, 2021
    Assignee: VIKING TECH CORPORATION
    Inventors: Ming-Chieh Kuo, Tsung-Yu Tsai, Chi-Yu Lu
  • Publication number: 20210350062
    Abstract: An integrated circuit includes at least one source/drain (S/D) line extending in second direction in a cell of the integrated circuit. The integrated circuit further includes a conductive element extending in a first direction in the cell of the integrated circuit, the first direction being perpendicular to the second direction. The integrated circuit further includes a power rail extending over the conductive element, wherein the power rail includes a first power rail portion and a second power rail portion, and an inner edge of the first power rail portion is offset from an inner edge of the second power rail portion, wherein the first power rail portion has a first edge and the second power rail portion has a second edge on the same side as the first edge of the first power rail portion, and the first edge and the second edge are laterally separated.
    Type: Application
    Filed: July 22, 2021
    Publication date: November 11, 2021
    Inventors: Jung-Chan YANG, Hui-Zhong ZHUANG, Ting-Wei CHIANG, Chi-Yu LU
  • Publication number: 20210313319
    Abstract: A method of making an integrated circuit includes steps of selecting a first cell and a second cell for an integrated circuit layout from a cell library in an electronic design automation (EDA) system, the first and second cells each having a cell active area, a cell gate electrode, at least one fin of a first set of fins, and a cell border region, each cell also having the active area at an exposed side, and placing the first exposed side against the second exposed side at a cell border. The method also includes operations of aligning at least one fin of the first set of fins with at least one fin of the second set of fins across a cell border.
    Type: Application
    Filed: April 1, 2020
    Publication date: October 7, 2021
    Inventors: Pin-Dai SUE, Ting-Wei CHIANG, Hui-Zhong ZHUANG, Ya-Chi CHOU, Chi-Yu LU
  • Publication number: 20210305031
    Abstract: The present invention discloses a method for preparing a thin film resistive layer. A tantalum nitride layer is formed on the surface of a substrate by a magnetron sputtering method, then a tantalum pentoxide layer is formed on the tantalum nitride layer by same method. Finally, both the tantalum nitride layer and the tantalum pentoxide layer are treated with an annealing process to obtain the thin film resistive layer with a low resistance change rate.
    Type: Application
    Filed: July 15, 2020
    Publication date: September 30, 2021
    Inventors: CHENG-CHUNG CHIU, CHI-YU LU