Patents by Inventor Chia-Ching Lin

Chia-Ching Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11640984
    Abstract: Techniques and mechanisms for providing electrical insulation or other protection of an integrated circuit (IC) device with a spacer structure which comprises an (anti)ferromagnetic material. In an embodiment, a transistor comprises doped source or drain regions and a channel region which are each disposed in a fin structure, wherein a gate electrode and an underlying dielectric layer of the transistor each extend over the channel region. Insulation spacers are disposed on opposite sides of the gate electrode, where at least a portion of one such insulation spacer comprises an (anti)ferroelectric material. Another portion of the insulation spacer comprises a non-(anti)ferroelectric material. In another embodiment, the two portions of the spacer are offset vertically from one another, wherein the (anti)ferroelectric portion forms a bottom of the spacer.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: May 2, 2023
    Assignee: Intel Corporation
    Inventors: Jack Kavalieros, Ian Young, Matthew Metz, Uygar Avci, Chia-Ching Lin, Owen Loh, Seung Hoon Sung, Aditya Kasukurti, Sou-Chi Chang, Tanay Gosavi, Ashish Verma Penumatcha
  • Patent number: 11637191
    Abstract: Describe is a resonator that uses ferroelectric (FE) materials in the gate of a transistor as a dielectric. The use of FE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, FE material expands or contacts depending on the applied electric field on the gate of the transistor. As such, acoustic waves are generated by switching polarization of the FE materials. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias' to body and dummy fins on the side. As such, a Bragg reflector is formed above the FE based transistor.
    Type: Grant
    Filed: January 2, 2019
    Date of Patent: April 25, 2023
    Assignee: Intel Corporation
    Inventors: Tanay Gosavi, Chia-ching Lin, Raseong Kim, Ashish Verma Penumatcha, Uygar Avci, Ian Young
  • Patent number: 11626451
    Abstract: A magnetic memory device comprising a plurality of memory cells is disclosed. The memory device includes an array of memory cells where each memory cell includes a first material layer having a ferromagnetic material, a second material layer having ruthenium, and a third material layer having bismuth and/or antimony. The second material layer is sandwiched between the first material layer and the third material in a stacked configuration.
    Type: Grant
    Filed: June 17, 2019
    Date of Patent: April 11, 2023
    Assignee: Intel Corporation
    Inventors: Emily Walker, Carl H. Naylor, Kaan Oguz, Kevin L. Lin, Tanay Gosavi, Christopher J. Jezewski, Chia-Ching Lin, Benjamin W. Buford, Dmitri E. Nikonov, John J. Plombon, Ian A. Young, Noriyuki Sato
  • Patent number: 11626475
    Abstract: An improved trench capacitor structure is disclosed that allows for the formation of narrower capacitors. An example capacitor structure includes a first conductive layer on the sidewalls of an opening through a thickness of a dielectric layer, a capacitor dielectric layer on the first conductive layer, a second conductive layer on the capacitor dielectric layer, and a conductive fill material on the second conductive layer. The capacitor dielectric layer laterally extends above the opening and along a top surface of the dielectric layer, and the conductive fill material fills a remaining portion of the opening.
    Type: Grant
    Filed: June 14, 2019
    Date of Patent: April 11, 2023
    Assignee: Intel Corporation
    Inventors: Nazila Haratipour, Chia-Ching Lin, Sou-Chi Chang, Ian A. Young, Uygar E. Avci, Jack T. Kavalieros
  • Patent number: 11621391
    Abstract: A memory device comprises an interconnect comprises a spin orbit coupling (SOC) material. A free magnetic layer is on the interconnect, a barrier material is over the free magnetic layer and a fixed magnetic layer is over the barrier material, wherein the free magnetic layer comprises an antiferromagnet. In another embodiment, memory device comprises a spin orbit coupling (SOC) interconnect and an antiferromagnet (AFM) free magnetic layer is on the interconnect. A ferromagnetic magnetic tunnel junction (MTJ) device is on the AFM free magnetic layer, wherein the ferromagnetic MTJ comprises a free magnet layer, a fixed magnet layer, and a barrier material between the free magnet layer and the fixed magnet layer.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: April 4, 2023
    Assignee: Intel Corporation
    Inventors: Chia-Ching Lin, Sasikanth Manipatruni, Tanay Gosavi, Dmitri Nikonov, Kaan Oguz, Ian A. Young
  • Publication number: 20230098594
    Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques related MIM capacitors that have a multiple trench structure to increase a charge density, where a dielectric of the MIM capacitor includes a perovskite-based material. In embodiments, a first electrically conductive layer may be coupled with a top metal layer of the MIM, and/or a second conductive layer may be coupled with a bottom metal layer of the MIM to reduce RC effects. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 24, 2021
    Publication date: March 30, 2023
    Inventors: Chia-Ching LIN, Kaan OGUZ, Sou-Chi CHANG, Arnab SEN GUPTA, I-Cheng TUNG, Ian A. YOUNG, Matthew V. METZ, Uygar E. AVCI, Sudarat LEE
  • Publication number: 20230100505
    Abstract: Embodiments disclosed herein include transistor devices and methods of forming such devices. In an embodiment, a transistor device comprises a first channel, wherein the first channel comprises a semiconductor material and a second channel above the first channel, wherein the second channel comprises the semiconductor material. In an embodiment, a first spacer is between the first channel and the second channel, and a second spacer is between the first channel and the second channel. In an embodiment, a first gate dielectric is over a surface of the first channel that faces the second channel, and a second gate dielectric is over a surface of the second channel that faces the first channel. In an embodiment, the first gate dielectric is physically separated from the second gate dielectric.
    Type: Application
    Filed: September 24, 2021
    Publication date: March 30, 2023
    Inventors: Ashish Verma PENUMATCHA, Sarah ATANASOV, Seung Hoon SUNG, Rahul RAMAMURTHY, I-Cheng TUNG, Uygar E. AVCI, Matthew V. METZ, Jack T. KAVALIEROS, Chia-Ching LIN, Kaan OGUZ
  • Publication number: 20230102177
    Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques related to stacked MIM capacitors with multiple metal and dielectric layers that include insulating spacers on edges of one or more of the multiple layers to prevent unintended electrical coupling between metal layers during manufacturing. The dielectric layers may include Perovskite-based materials. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 24, 2021
    Publication date: March 30, 2023
    Inventors: Chia-Ching LIN, Sou-Chi CHANG, Kaan OGUZ, I-Cheng TUNG, Arnab SEN GUPTA, Ian A. YOUNG, Uygar E. AVCI, Matthew V. METZ
  • Publication number: 20230100649
    Abstract: Magnetoelectric magnetic tunnel junction (MEMTJ) logic devices comprise a magnetoelectric switching capacitor coupled to a pair of magnetic tunnel junctions (MTJs) by an insulating layer. The logic state of the MEMTJ is represented by the magnetization orientation of the ferromagnetic layer of the magnetoelectric capacitor and can be switched through the application of an input voltage to the MEMTJ that causes the magnetoelectric switching capacitor to switch states. The magnetization orientation of the magnetoelectric capacitor ferromagnetic layer is read out by the MTJs. The magnetization orientation of a ferromagnetic free layer common to the MTJs is coupled to the ferromagnetic layer of the magnetoelectric capacitor. The potential of the ferromagnetic free layer is based on the power supply voltage applied to the ferromagnetic reference layer of the MTJ having a magnetization orientation parallel to that of the ferromagnetic free layer.
    Type: Application
    Filed: September 24, 2021
    Publication date: March 30, 2023
    Applicant: Intel Corporation
    Inventors: Hai Li, Chia-Ching Lin, Dmitri Evgenievich Nikonov, Ian Alexander Young
  • Publication number: 20230100952
    Abstract: Embodiments disclosed herein include transistors and transistor gate stacks. In an embodiment, a transistor gate stack comprises a semiconductor channel. In an embodiment, an interlayer (IL) is over the semiconductor channel. In an embodiment, the IL has a thickness of 1 nm or less and comprises zirconium. In an embodiment, a gate dielectric is over the IL, and a gate metal over the gate dielectric.
    Type: Application
    Filed: September 24, 2021
    Publication date: March 30, 2023
    Inventors: I-Cheng TUNG, Ashish Verma PENUMATCHA, Seung Hoon SUNG, Sarah ATANASOV, Jack T. KAVALIEROS, Matther V. METZ, Uygar E. AVCI, Rahul RAMAMURTHY, Chia-Ching LIN, Kaan OGUZ
  • Patent number: 11616130
    Abstract: Techniques and mechanisms to provide electrical insulation between a gate and a channel region of a non-planar circuit device. In an embodiment, the gate structure, and insulation spacers at opposite respective sides of the gate structure, each extend over a semiconductor fin structure. In a region between the insulation spacers, a first dielectric layer extends conformally over the fin, and a second dielectric layer adjoins and extends conformally over the first dielectric layer. A third dielectric layer, adjoining the second dielectric layer and the insulation spacers, extends under the gate structure. Of the first, second and third dielectric layers, the third dielectric layer is conformal to respective sidewalls of the insulation spacers. In another embodiment, the second dielectric layer is of dielectric constant which is greater than that of the first dielectric layer, and equal to or less than that of the third dielectric layer.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Jack Kavalieros, Ian Young, Matthew Metz, Uygar Avci, Devin Merrill, Ashish Verma Penumatcha, Chia-Ching Lin, Owen Loh
  • Publication number: 20230090093
    Abstract: Thin film transistors having semiconductor structures integrated with two-dimensional (2D) channel materials are described. In an example, an integrated circuit structure includes a two-dimensional (2D) material layer above a substrate. A gate stack is above the 2D material layer, the gate stack having a first side opposite a second side. A semiconductor structure including germanium is included, the semiconductor structure laterally adjacent to and in contact with the 2D material layer adjacent the first side of the gate stack. A first conductive structure is adjacent the first side of the second gate stack, the first conductive structure over and in direct electrical contact with the semiconductor structure. The semiconductor structure is intervening between the first conductive structure and the 2D material layer. A second conductive structure is adjacent the second side of the second gate stack, the second conductive structure over and in direct electrical contact with the 2D material layer.
    Type: Application
    Filed: September 20, 2021
    Publication date: March 23, 2023
    Inventors: Ashish Verma PENUMATCHA, Uygar E. AVCI, Chelsey DOROW, Tanay GOSAVI, Chia-Ching LIN, Carl NAYLOR, Nazila HARATIPOUR, Kevin P. O'BRIEN, Seung Hoon SUNG, Ian A. YOUNG, Urusa ALAAN
  • Publication number: 20230087624
    Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques related to increasing the capacitance density of MIM capacitors on dies or within packages. In particular, a MIM stack is disclosed that has multiple insulator layers between the metal, in order to increase the dielectric constant of the MIM stack. In particular, the first dielectric layer may include strontium, titanium, and oxygen and may be physically coupled with a second dielectric layer that may include barium, strontium, titanium, and oxygen. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 23, 2021
    Publication date: March 23, 2023
    Inventors: Kaan OGUZ, I-Cheng TUNG, Chia-Ching LIN, Sou-Chi CHANG, Matthew V. METZ, Uygar E. AVCI, Arnab SEN GUPTA
  • Publication number: 20230086080
    Abstract: In one embodiment, an apparatus includes a magnet, a first structure, and a second structure. The first structure includes a first conductive trace and a magnetoelectric material. The first conductive trace is coupled to an input voltage terminal, and the magnetoelectric material is coupled to the first conductive trace and the magnet. The second structure includes a superlattice structure and a second conductive trace. The superlattice structure includes one or more topological insulator materials. Moreover, the superlattice structure is coupled to the magnet and the second conductive trace, and the second conductive trace is coupled to an output voltage terminal.
    Type: Application
    Filed: September 22, 2021
    Publication date: March 23, 2023
    Applicant: Intel Corporation
    Inventors: Chia-Ching Lin, Dmitri Evgenievich Nikonov, Ian Alexander Young, John J. Plombon, Hai Li, Kaan Oguz, Tanay A. Gosavi, Emily Walker
  • Patent number: 11605624
    Abstract: Describe is a resonator that uses ferroelectric (FE) material in a capacitive structure. The resonator includes a first plurality of metal lines extending in a first direction; an array of capacitors comprising ferroelectric material; a second plurality of metal lines extending in the first direction, wherein the array of capacitors is coupled between the first and second plurality of metal lines; and a circuitry to switch polarization of at least one capacitor of the array of capacitors. The switching of polarization regenerates acoustic waves. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using metal lines above and adjacent to the FE based capacitors.
    Type: Grant
    Filed: January 2, 2019
    Date of Patent: March 14, 2023
    Assignee: Intel Corporation
    Inventors: Tanay Gosavi, Chia-ching Lin, Raseong Kim, Ashish Verma Penumatcha, Uygar Avci, Ian Young
  • Publication number: 20230077177
    Abstract: A spin orbit logic (SOL) device includes a first electrically conductive layer; a layer comprising a ferroelectric material (FE layer) on the first electrically conductive layer; a second electrically conductive layer on the FE layer; and a spin orbit coupling (SOC) stack including a first layer (SOC1 layer) including a first SOC material, and a second layer (SOC2 layer) including a second SOC material, the SOC1 layer adjacent the FE layer.
    Type: Application
    Filed: September 8, 2021
    Publication date: March 9, 2023
    Applicant: Intel Corporation
    Inventors: Hai Li, Dmitri Evgenievich Nikonov, Chia-Ching Lin, Tanay A. Gosavi, Ian Alexander Young
  • Publication number: 20230063023
    Abstract: A system and a method for predicting a remaining useful life of a transformer are provided. The system includes the transformer and a processing device. The transformer includes a liquid insulating material and a solid insulating material. The processing device is configured to establish, through a machine learning method, a life prediction model based on status data and corresponding life loss data of the liquid insulating material and the solid insulating material, and the processing device uses the life prediction model to predict the remaining useful life of the transformer based on operating data of the transformer.
    Type: Application
    Filed: September 1, 2021
    Publication date: March 2, 2023
    Inventors: Guan-shiang Wang, Jen-wen Chang, CHIA-CHING LIN
  • Publication number: 20230065198
    Abstract: A memory device, an integrated circuit component including an array of the memory devices, and an integrated device assembly including the integrated circuit component. The memory devices includes a first electrode; a second electrode including an antiferromagnetic (AFM) material; and a memory stack including: a first layer adjacent the second electrode and including a multilayer stack of adjacent layers comprising ferromagnetic materials; a second layer adjacent the first layer; and a third layer adjacent the second layer at one side thereof, and adjacent the first electrode at another side thereof, the second layer between the first layer and the third layer, the third layer including a ferromagnetic material. The memory device may correspond to a magnetic tunnel junction (MTJ) magnetic random access memory bit cell, and the memory stack may correspond to a MTJ device.
    Type: Application
    Filed: September 2, 2021
    Publication date: March 2, 2023
    Applicant: Intel Corporation
    Inventors: Ian Alexander Young, Dmitri Evgenievich Nikonov, Chia-Ching Lin, Tanay A. Gosavi, Ashish Verma Penumatcha, Kaan Oguz, Punyashloka Debashis
  • Patent number: 11594270
    Abstract: An apparatus is provided which comprises: a magnetic junction having a magnet with perpendicular magnetic anisotropy (PMA) relative to an x-y plane of a device. In some embodiments, the apparatus comprises an interconnect partially adjacent to the structure of the magnetic junction, wherein the interconnect comprises a spin orbit material, wherein the interconnect has a pocket comprising non-spin orbit material, wherein the pocket is adjacent to the magnet of the magnetic junction. In some embodiments, the non-spin orbit material comprises metal which includes one or more of: Cu, Al, Ag, or Au.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: February 28, 2023
    Assignee: Intel Corporation
    Inventors: Tanay Gosavi, Sasikanth Manipatruni, Chia-Ching Lin, Dmitri Nikonov, Christopher Wiegand, Ian Young
  • Patent number: 11594624
    Abstract: Embodiments disclosed herein include transistor devices with complex oxide interfaces and methods of forming such devices. In an embodiment, the transistor device may comprise a substrate, and a fin extending up from the substrate. In an embodiment, a first oxide is formed over sidewall surfaces of the fin, and a second oxide is formed over the first oxide. In an embodiment, the first oxide and the second oxide are perovskite oxides with the general formula of ABO3.
    Type: Grant
    Filed: December 13, 2018
    Date of Patent: February 28, 2023
    Assignee: Intel Corporation
    Inventors: Sasikanth Manipatruni, Dmitri Nikonov, Chia-Ching Lin, Tanay Gosavi, Uygar Avci, Ian Young