Abstract: A method includes: receiving a design layout comprising a feature extending in a peripheral region and a central region of the design layout; determining compensation values associated with a pellicle assembly and the peripheral region according to an exposure distribution in an exposure field of a workpiece; and adjusting the design layout according to the compensation values. The modifying of the shape of the feature according to the compensation values includes: partitioning the peripheral region into compensation zones; and adjusting line widths in the compensation zones of the feature according to the compensation values associated with the respective compensation zones.

Abstract: In some embodiments, the present disclosure relates to a device having a semiconductor substrate including a frontside and a backside. On the frontside of the semiconductor substrate are a first source/drain region and a second source/drain region. A gate electrode is arranged on the frontside of the semiconductor substrate and includes a horizontal portion, a first vertical portion, and a second vertical portion. The horizontal portion is arranged over the frontside of the semiconductor substrate and between the first and second source/drain regions. The first vertical portion extends from the frontside towards the backside of the semiconductor substrate and contacts the horizontal portion of the gate electrode structure. The second vertical portion extends from the frontside towards the backside of the semiconductor substrate, contacts the horizontal portion of the gate electrode structure, and is separated from the first vertical portion by a channel region of the substrate.

Abstract: A method includes: receiving a design layout comprising a feature extending in a peripheral region and a central region of the design layout; determining compensation values associated with a pellicle assembly and the peripheral region according to an exposure distribution in an exposure field of a workpiece; and adjusting the design layout according to the compensation values. The modifying of the shape of the feature according to the compensation values includes: partitioning the peripheral region into compensation zones, wherein the feature includes first portions disposed within the respective compensation zones and a second portion disposed within the central region; and reducing line widths of the first portions of the feature according to the compensation values associated with the respective compensation zones while keep the second portion of the feature uncompensated.

Abstract: A method includes: receiving a design layout comprising a feature extending in a peripheral region and a central region of the design layout; determining compensation values associated with a pellicle assembly and the peripheral region according to an exposure distribution in an exposure field of a workpiece; and adjusting the design layout according to the compensation values. The modifying of the shape of the feature according to the compensation values includes: partitioning the peripheral region into compensation zones, wherein the feature includes first portions disposed within the respective compensation zones and a second portion disposed within the central region; and reducing line widths of the first portions of the feature according to the compensation values associated with the respective compensation zones while keep the second portion of the feature uncompensated.

Abstract: A method, a non-transitory computer-readable storage medium and a system for adjusting a design layout are provided. The method includes: receiving a design layout including a feature in a peripheral region of the design layout; determining a first compensation value associated with the peripheral region according to an exposure distribution in an exposure field of a workpiece; and adjusting the design layout by modifying a shape of the feature according to the compensation value.

Abstract: A method, a non-transitory computer-readable storage medium and a system for adjusting a design layout are provided. The method includes: receiving a design layout including a feature in a peripheral region of the design layout; determining a first compensation value associated with the peripheral region according to an exposure distribution in an exposure field of a workpiece; and adjusting the design layout by modifying a shape of the feature according to the compensation value.

Abstract: A method executes a gyroscope function to unlock a portable electronic device. A user can rotate the portable electronic device to set a predetermined rotation direction and a predetermined rotation angle for unlocking the portable electronic device. In an unlock procedure, the gyroscope detects the rotated portable electronic device and outputs detected information of the portable electronic device. If the rotation direction and the rotation angle are the same as the predetermined rotation direction and the predetermined rotation angle, the locked portable electronic device is unlocked.

Abstract: A method executes a gyroscope function to unlock a portable electronic device. A user can rotate the portable electronic device to set a predetermined rotation direction and a predetermined rotation angle for unlocking the portable electronic device. In an unlock procedure, the gyroscope detects the rotated portable electronic device and outputs detected information of the portable electronic device. If the rotation direction and the rotation angle are the same as the predetermined rotation direction and the predetermined rotation angle, the locked portable electronic device is unlocked.

Abstract: A portable electronic device includes a first process control unit to send and receive a control signal, a battery electrically connected to the first process control unit to provide electrical power for the first process control unit, and a charging unit to charge the battery. The charge control unit comprises a charging procedure to control a work mode of the charging unit. A switch is electrically connected to the first process control unit and the charging unit to decide whether the charging unit works or not, and a first connecting port electrically connected to the first process control unit and the switch, to transmit a control signal, a digital signal and a power signal.