Patents by Inventor Chia-Shin Lin
Chia-Shin Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 12002867Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a gate structure over the substrate, a layer of dielectric material over the gate structure, a source/drain (S/D) contact layer formed through and adjacent to the gate structure, and a trench conductor layer over and in contact with the S/D contact layer. The S/D contact layer can include a layer of platinum-group metallic material and a silicide layer formed between the substrate and the layer of platinum-group metallic material. A top width of a top portion of the layer of platinum-group metallic material can be greater than or substantially equal to a bottom width of a bottom portion of the layer of platinum-group metallic material.Type: GrantFiled: August 27, 2021Date of Patent: June 4, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Hung Chu, Shuen-Shin Liang, Hsu-Kai Chang, Tzu Pei Chen, Kan-Ju Lin, Chien Chang, Hung-Yi Huang, Sung-Li Wang
-
Patent number: 11972974Abstract: An IC structure includes a transistor, a source/drain contact, a metal oxide layer, a non-metal oxide layer, a barrier structure, and a via. The transistor includes a gate structure and source/drain regions on opposite sides of the gate structure. The source/drain contact is over one of the source/drain regions. The metal oxide layer is over the source/drain contact. The non-metal oxide layer is over the metal oxide layer. The barrier structure is over the source/drain contact. The barrier structure forms a first interface with the metal oxide layer and a second interface with the non-metal oxide layer, and the second interface is laterally offset from the first interface. The via extends through the non-metal oxide layer to the barrier structure.Type: GrantFiled: January 13, 2022Date of Patent: April 30, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Sung-Li Wang, Shuen-Shin Liang, Yu-Yun Peng, Fang-Wei Lee, Chia-Hung Chu, Mrunal Abhijith Khaderbad, Keng-Chu Lin
-
Publication number: 20240096998Abstract: The present disclosure describes a method for forming metallization layers that include a ruthenium metal liner and a cobalt metal fill. The method includes depositing a first dielectric on a substrate having a gate structure and source/drain (S/D) structures, forming an opening in the first dielectric to expose the S/D structures, and depositing a ruthenium metal on bottom and sidewall surfaces of the opening. The method further includes depositing a cobalt metal on the ruthenium metal to fill the opening, reflowing the cobalt metal, and planarizing the cobalt and ruthenium metals to form S/D conductive structures with a top surface coplanar with a top surface of the first dielectric.Type: ApplicationFiled: November 21, 2023Publication date: March 21, 2024Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shuen-Shin LIANG, Chij-chien CHI, Yi-Ying LIU, Chia-Hung CHU, Hsu-Kai CHANG, Cheng-Wei CHANG, Chein-Shun LIAO, Keng-chu LIN, KAi-Ting HUANG
-
Patent number: 11929327Abstract: The present disclosure describes a method for forming liner-free or barrier-free conductive structures. The method includes depositing an etch stop layer on a cobalt contact disposed on a substrate, depositing a dielectric on the etch stop layer, etching the dielectric and the etch stop layer to form an opening that exposes a top surface of the cobalt contact, and etching the exposed top surface of the cobalt contact to form a recess in the cobalt contact extending laterally under the etch stop layer. The method further includes depositing a ruthenium metal to substantially fill the recess and the opening, and annealing the ruthenium metal to form an oxide layer between the ruthenium metal and the dielectric.Type: GrantFiled: July 22, 2020Date of Patent: March 12, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Inc.Inventors: Hsu-Kai Chang, Keng-Chu Lin, Sung-Li Wang, Shuen-Shin Liang, Chia-Hung Chu
-
Publication number: 20230352278Abstract: A plasma-exclusion-zone ring for a substrate processing system that is configured to process a substrate includes a ring-shaped body, an upper portion of the ring-shaped body, a base and a plasma-exclusion-zone ring notch. The upper portion of the ring-shaped body defines a radially inner surface and a top surface. The base of the ring-shaped body defines a radially outer surface, a first bottom surface extending radially inward from the radially outer surface, and a second bottom surface extending radially inward from the first bottom surface. The plasma-exclusion-zone ring notch is proportional to an alignment notch of the substrate. The first bottom surface is tapered and extends at an acute angle from the second bottom surface to the radially outer surface. The first bottom surface is configured to extend over and oppose a periphery of the substrate.Type: ApplicationFiled: March 26, 2021Publication date: November 2, 2023Inventors: Xuefeng HUA, Jack CHEN, Gnanamani AMBUROSE, Dan ZHANG, Chang-Wei HUANG, Chia-Shin LIN
-
Publication number: 20230317445Abstract: Semiconductor processing methods and apparatuses are provided. Some methods include providing a first wafer to a processing chamber, the first wafer having a thickness, a beveled edge, a first side, and a plurality of devices formed in a device area on the first side, the device area having an outer perimeter, depositing an annular ring of material on the first wafer, the annular ring of material covering a region of the beveled edge and the outer perimeter of the device area, and having an inner boundary closer to the center point of the first wafer than the outer perimeter, bonding a second substrate to the plurality of devices and to a portion of the annular ring of material, and thinning the thickness of the first wafer.Type: ApplicationFiled: August 13, 2021Publication date: October 5, 2023Inventors: Xuefeng Hua, Jack Chen, Ian Scot Latchford, Chia-Shin Lin, Chanthavisa Keovisai
-
Patent number: 8977145Abstract: A detection device for detecting a state of a waste toner container comprises an optical sensor and an actuation member. The optical sensor comprises an emitting unit emitting an optical signal and a receiving unit receiving the optical signal. A space is provided between the emitting and receiving units, and the optical signal travels along an optical path from the emitting unit to the receiving unit. The actuation member is movably disposed between the emitting and receiving units. The actuation member in a first position interrupts the optical path of the optical signal; and the actuation member is moved by the waste toner container to a second position when at least a part of the waste toner container is placed in the space. The actuation member in the second position allows a passage of the optical signal. An image forming apparatus using such a detection device is also provided.Type: GrantFiled: November 4, 2013Date of Patent: March 10, 2015Assignee: Avision Inc.Inventor: Chia-Shin Lin
-
Publication number: 20140178083Abstract: A detection device for detecting a state of a waste toner container comprises an optical sensor and an actuation member. The optical sensor comprises an emitting unit emitting an optical signal and a receiving unit receiving the optical signal. A space is provided between the emitting and receiving units, and the optical signal travels along an optical path from the emitting unit to the receiving unit. The actuation member is movably disposed between the emitting and receiving units. The actuation member in a first position interrupts the optical path of the optical signal; and the actuation member is moved by the waste toner container to a second position when at least a part of the waste toner container is placed in the space. The actuation member in the second position allows a passage of the optical signal. An image forming apparatus using such a detection device is also provided.Type: ApplicationFiled: November 4, 2013Publication date: June 26, 2014Applicant: AVISION INC.Inventor: Chia-Shin LIN
-
Patent number: 8157258Abstract: A torque limiting roller includes a shaft, a frictional unit, a roller assembly, a fixing unit and an elastic unit. The shaft includes a first end and a second end. The frictional unit is mounted on the first end of the shaft. The roller assembly is rotatably mounted on the shaft and includes a first end and a second end. The first end of the roller assembly is in frictional contact with the frictional unit. The fixing unit is mounted on the second end of the shaft. The elastic unit is mounted on the shaft, disposed between the fixing unit and the roller assembly, and contacts with the second end of the roller assembly and the fixing unit to provide a normal force between the roller assembly and the frictional unit and thus to provide limiting torque. A medium separating mechanism using the torque limiting roller is also disclosed.Type: GrantFiled: December 22, 2009Date of Patent: April 17, 2012Assignee: Avision Inc.Inventor: Chia-Shin Lin
-
Publication number: 20100213665Abstract: A torque limiting roller includes a shaft, a frictional unit, a roller assembly, a fixing unit and an elastic unit. The shaft includes a first end and a second end. The frictional unit is mounted on the first end of the shaft. The roller assembly is rotatably mounted on the shaft and includes a first end and a second end. The first end of the roller assembly is in frictional contact with the frictional unit. The fixing unit is mounted on the second end of the shaft. The elastic unit is mounted on the shaft, disposed between the fixing unit and the roller assembly, and contacts with the second end of the roller assembly and the fixing unit to provide a normal force between the roller assembly and the frictional unit and thus to provide limiting torque. A medium separating mechanism using the torque limiting roller is also disclosed.Type: ApplicationFiled: December 22, 2009Publication date: August 26, 2010Inventor: Chia-Shin LIN
-
Patent number: 7733542Abstract: An image reading apparatus includes a casing, an upper plate and a transparent plate. The casing has a first opening, and a reading means is disposed in the casing. The upper casing plate is disposed over the casing and has a second opening that is positioned opposite the first opening. The transparent plate is mounted on the first opening. The transparent plate is wedged in the second opening through assembly of the casing and the upper plate.Type: GrantFiled: September 19, 2007Date of Patent: June 8, 2010Assignee: Avision Inc.Inventors: Chia-Shin Lin, Ching-Jung Tu
-
Patent number: 7564598Abstract: A hinge assembly capable of retaining a cable includes a hollow hub disposed on a first body, a bracket holder disposed on a second body, and an integrating member rotatably disposed on the hollow hub for integrating the hollow hub to the bracket holder and having a through hole and an external mounting part. The hollow hub inserts into the through hole. The external mounting part formed around an outer circumference of the through hole mounts the hollow hub on the bracket holder and abuts on the bracket holder. The integrating member is rotated to fix the hollow hub firmly to the bracket holder. The cable for electrically connecting the first body to the second body passes through the hollow hub.Type: GrantFiled: February 18, 2005Date of Patent: July 21, 2009Assignee: Avision Inc.Inventor: Chia-Shin Lin
-
Publication number: 20090146365Abstract: A paper feeder and an image processing apparatus using the same are provided. The paper feeder includes a feeding plate, a paper guide, a paper-feeding unit and a friction provider. The feeding plate is for supporting at least one sheet of paper. The paper guide is disposed on a side of the feeding plate for aligning the sheet of paper. The paper-feeding unit is disposed at a paper-feeding end of the feeding plate for conveying the sheet of paper. The friction provider is disposed on one lateral side of the paper-feeding unit, for increasing the friction between the sheet of paper and the surface of the feeding plate, and the paper guide is disposed on the other lateral side of the paper-feeding unit.Type: ApplicationFiled: December 2, 2008Publication date: June 11, 2009Applicant: AVISION INC.Inventors: Thomas Sheng, Chia-Shin Lin, Ching-Jung Tu
-
Publication number: 20090039587Abstract: An automatic paper feed device is disposed in a machine with a plurality of paper feed slots and comprises a paper storing unit having a plurality of inclined paper feed trays or paper feed slots, and a paper stopping unit which is mounted before the joint of a paper feed roller and the inclined paper feed trays or the paper feed slots. A driving member controls the movement of the paper stopping unit, and the paper stopping unit moves at a lower portion of the papers to be fed. By such arrangements, the papers fed at different inclinations and in different orders will be stopped by the paper stopping unit, and then will be released according to the predetermined order of the paper feed trays, so as to avoid the problem of paper jam.Type: ApplicationFiled: March 15, 2008Publication date: February 12, 2009Inventor: Chia-Shin LIN
-
Publication number: 20080106770Abstract: An image reading apparatus includes a casing, an upper plate and a transparent plate. The casing has a first opening, and a reading means is disposed in the casing. The upper casing plate is disposed over the casing and has a second opening that is positioned opposite the first opening. The transparent plate is mounted on the first opening. The transparent plate is wedged in the second opening through assembly of the casing and the upper plate.Type: ApplicationFiled: September 19, 2007Publication date: May 8, 2008Inventors: Chia-Shin Lin, Ching-Jung Tu
-
Publication number: 20080094679Abstract: A light source module includes a base, a cold cathode fluorescent lamp (CCFL) and an auxiliary light emitting unit. The CCFL disposed on the base provides main light. The auxiliary light emitting unit disposed on the base includes a plurality of light emitting diodes (LEDs) respectively disposed adjacent to two ends of the CCFL. The auxiliary light emitting unit provides auxiliary light to compensate for the main light, wherein the light source module emits scanning light, which is substantially uniformly distributed along a length of the CCFL.Type: ApplicationFiled: October 12, 2007Publication date: April 24, 2008Inventors: Yu-Lang Wang, Min Chieh Chiang, Chia-Shin Lin
-
Publication number: 20050183241Abstract: A hinge assembly capable of retaining a cable includes a hollow hub disposed on a first body, a bracket holder disposed on a second body, and an integrating member having a through hole and an external mounting part. The hollow hub inserts into the through hole, and the integrating member is rotatable relative to the hollow hub. The external mounting part formed around an outer circumference of the through hole upholds the integrating member on the bracket holder. The cable for electrically connecting the first body to the second body passes through the hollow hub.Type: ApplicationFiled: February 18, 2005Publication date: August 25, 2005Inventor: Chia-Shin Lin