Abstract: A catoptric projection optical system for projecting a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image includes first, second, third and fourth mirrors serving substantially as a coaxial system so as to sequentially reflect light from an object side to an image side, and being arranged so that light from the object surface to the first mirror may intersect light from the second mirror to the third mirror.

Abstract: A projection optical system for projecting an image of an object onto an image plane. The projection optical system includes a first imaging optical system for forming an image of the object in which the first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, a second imaging optical system for re-imaging the image upon the image plane, a second mirror for reflecting light from the first mirror to the image plane side, whereby the abaxial light is caused to pass outside of an effective diameter of the first mirror, and a field optical system including three lenses each having a positive refractive power. The abaxial light passed through the outside of the effective diameter of the first mirror is refracted by the three lenses toward a direction nearing an optical axis of the three lenses.

Abstract: A projection optical system includes a plurality of positive lens groups having a positive refractive power, and at least one negative lens group having a negative refractive power, wherein, when L is a conjugate distance of the projection optical system and ?0 is the sum of powers of the or each negative lens group, a relation |L×?0|>17 is satisfied, wherein, when h is a height of an axial marginal light ray and hb is a height of a most abaxial chief ray, at least two aspherical surfaces are formed on surfaces which satisfy a relation |hb/h|>0.35, wherein, when ?ASPH is an aspherical amount of each aspherical surface, a relation |?ASPH/L|>1.0×10?6 is satisfied, and wherein the at least two aspherical surfaces include regions in which, from a central portion toward a peripheral portion of the surface, their local curvature powers change with mutually opposite signs.

Abstract: A reflection type projection optical system for projecting a pattern on an object surface onto an image surface and forming an imaging system that forms an intermediate image between the object surface and image surface includes four or more mirrors arranged substantially as a coaxial system to reflect light from an object side to an image side, reflection surfaces on the four or more mirrors forming the same direction for forming a reflection angle.

Abstract: A projection optical system includes at least one lens, at least one concave mirror, at least one diffractive optical element, a first imaging optical system that includes the at least one lens and the at least one concave mirror, for imaging an intermediate image of an object, a second imaging optical system, having the at least one lens and the at least one diffractive optical element, for projecting the intermediate image onto an image plane, and a field optical system disposed between the first and second imaging optical systems.

Abstract: A projection optical system for projecting an image of a first object onto a second object includes a first imaging optical system that forms a first intermediate image of the first object, and includes a lens, a second imaging optical system that forms a second intermediate image of the first object, and includes a lens and a concave mirror, and a third imaging optical system that forms an image of the first object onto the second object, and includes a lens, wherein the first, second and third imaging optical systems are arranged along an optical path from the first object in this order, and 0.7<|&bgr;1·&bgr;2<<3.0 is met where &bgr;1 is a paraxial magnification of the first imaging optical system, and &bgr;2 is a paraxial magnification of the second imaging optical system.

Abstract: A cataoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface includes eight mirrors that includes, in order from the object surface side to the image surface side, a first mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror, a sixth mirror, a seventh mirror, and an eighth mirror, and forming an intermediate image between the sixth mirror and the seventh mirror on an optical path, wherein a position in a height direction of a principal ray from an optical axis at each mirror displaces, and a displacement direction from the first mirror to the fourth mirror is reverse to that from the fifth mirror to the eight mirror, wherein wherein said second mirror to said fifth mirror are concave mirror, a convex mirror, a concave mirror and a concave mirror, and said seventh mirror to said eighth are a convex mirror and a concave mirror, and wherein said second mirror in said eight mirrors is located closest to the object surface side.

Abstract: A projection exposure apparatus includes a projection optical system for projecting a pattern of a reticle onto a photosensitive substrate. The projection optical system includes at least three lens units, including a lens unit of a positive refractive power and a lens unit of a negative refractive power, and an aspherical lens having aspherical surfaces formed on both sides thereof, in which a relation |Lxø0|>17 is satisfied, where L is a conjugate distance of the projection optical system and ø0 is the total power of the negative lens unit or of negative lens units of the projection optical system. Each aspherical surface of said aspherical surface lens is disposed at a position satisfying a relation |hb/h|>0.36 where h is a height of an axial marginal light ray, and hb is a height of a most abaxial chief ray, and each aspherical surface of the aspherical surface lens satisfies a relation |&Dgr;ASPH/L|>1.

Abstract: A reflection type projection optical system includes six mirrors that serve substantially as a coaxial system, and include, in order from an object side to an image side, a first mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror, and a sixth mirror to sequentially reflect light, wherein the reflection type projection optical system serves as an imaging system that forms an intermediate image along an optical path between the third mirror and the fifth mirror, and wherein a displacement direction of a principal ray viewed from an optical axis from the first mirror to the second mirror is reverse to that from the third mirror to the sixth mirror.

Abstract: A cataoptric projection optical system for projecting a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image includes first, second, third and fourth mirrors serving substantially as a coaxial system so as to sequentially reflect light from an object side to an image side, and being arranged so that light from the object surface to the first mirror may intersect light from the second mirror to the third mirror.

Abstract: A reflection type projection optical system for projecting a pattern on an object surface onto an image surface and forming an imaging system that forms an intermediate image between the object surface and image surface includes four or more mirrors arranged substantially as a coaxial system to reflect light from an object side to an image side, reflection surfaces on the four or more mirrors forming the same direction for forming a reflection angle.

Abstract: A reflection type demagnification projection optical system that uses light of light with a wavelength of 200 nm or less includes six light-reflecting mirrors arranged from an object side to an image side such that said mirrors basically form a coaxial system, wherein a third mirror in said six mirrors is located at a pupil position of said optical system.

Abstract: A projection optical system for projecting a pattern of a mask onto a wafer, includes at least one aspherical surface lens having an aspherical surface on one side and a flat surface on the other side, the spherical surface satisfying a relation |&Dgr;ASPH/L|>1×10−6 where &Dgr;ASPH is the aspherical amount of the aspherical surface and L is an object-to-image distance of the projection optical system.

Abstract: Disclosed is a projection optical system for projecting an image of an object onto an image plane, which includes a first imaging optical system for forming an image of the object, a second imaging optical system for re-imaging the image upon the image plane, wherein the first and second imaging optical systems are disposed in an order from the object side and are disposed along a common straight optical axis, wherein the first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, wherein one of the first and second imaging optical systems includes a second mirror for reflecting light from the first mirror to the image plane side, and wherein, with the second mirror, the abaxial light is caused to pass an outside of an effective diameter of the first mirror.

Abstract: Disclosed is a projection optical system having at least one lens, at least one concave mirror, and at least one diffractive optical element. In one preferred form of the invention, the projection optical system includes a first imaging optical system having the at least one lens and the at least one concave mirror, for imaging an intermediate image of an object, and a second imaging optical system having the at least one lens and at least one diffractive optical element, for projecting the intermediate image onto an image plane.

Abstract: A zoom lens has, in succession from the object side, a first lens unit fixed during a focal length change and having positive refractive power, a second lens unit moved along the optical axis thereof during the focal length change, a third lens unit for correcting the fluctuation of the image plane resulting from the focal length change, and a fourth lens unit fixed during the focal length change and having positive refractive power. The second lens unit has a lens subunit of negative refractive power and a lens subunit of positive refractive power. The lens subunits are moved at different speeds during the focal length change, and the conditions of the lens are satisfied to correct the fluctuations in aberration during the focal length change.

Abstract: A zoom lens is disclosed comprising, from front to rear, a first lens unit of positive refractive power, a second lens unit of negative refractive power, a flare cut stop for cutting a lower marginal ray of an off-axial bundle of rays for a maximum image height, a third lens unit of positive refractive power and a fourth lens unit of positive refractive power, wherein the second and third lens units move axially to effect zooming, while either varying the aperture diameter of the flare cut stop or axially moving the flare cut stop to thereby cut the harmful rays for good optical performance.

Abstract: A zoom lens comprising, from front to rear, a first lens unit of positive refractive power, a second lens unit of negative refractive power for varying the focal length, a third lens unit of positive or negative refractive power for compensating for the image shift with zooming, an aperture stop and a fourth lens unit having the image forming function and stationary during zooming, wherein the first lens unit has a front lens sub-unit of negative refractive power, a first lens sub-unit of positive refractive power and a second lens sub-unit of positive refractive power, and wherein during focusing from an infinitely distant object to an object at the minimum distance, at least the first and second lens sub-units are axially moved.

Abstract: A high range zoom lens is disclosed, comprising, from front to rear, a first lens unit of positive refractive power, a second lens unit of negative refractive power, a third lens unit of positive or negative refractive power and a fourth lens unit of positive refractive power, the second and third lens units being movable for zooming, wherein an aspheric surface is introduced into the second or third lens unit at a specified location so that the variation of aberrations with zooming is as far reduced for high performance as possible.

Abstract: A high range zoom lens is disclosed, comprising, from front to rear, a first lens unit of positive refractive power, a second lens unit of negative refractive power, a third lens unit of positive or negative refractive power and a fourth lens unit of positive refractive power, the second and third lens units being movable for zooming, wherein an aspheric surface is introduced into the second or third lens unit at a specified location so that the variation of aberrations with zooming is as far reduced for high performance as possible.