Patents by Inventor Chichoy Lim

Chichoy Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputter deposition shield assembly to reduce cathode shorting
    Patent number: 8591709
    Abstract: A shield assembly for a sputter deposition chamber, the shield assembly including an outer sleeve with a gas inlet to conduct a gas through the outer sleeve and an inner sleeve disposed within the outer sleeve, the inner sleeve including gas channels on a surface mating with the outer sleeve to conduct the gas between the inner and outer sleeves. The shield assembly may further include an aperture ring adjacent to a first end of both the inner and outer sleeves, the aperture ring including a plurality of gas outlets to conduct the gas from the gas channels and an inner aperture flange extending from the plurality of gas outlets and adjacent to gas shield flange to form a gas runway for conducting the gas toward a sputter target located within the deposition chamber.
    Type: Grant
    Filed: May 18, 2010
    Date of Patent: November 26, 2013
    Assignee: WD Media, LLC
    Inventors: Chichoy Lim, Eang Keong Tan, Weng Aun Teh, Yi Chun Tan, Sheik Chian Lee