Abstract: A measurement system is configured to measure a surface structure of a sample. The surface of the sample has a thin film and a via, the depth of the via is larger than the thickness of the thin film. The measurement system includes a light source, a first light splitter, a first aperture stop, a lens assembly, a second aperture stop, a spectrum analyzer and an analysis module. The first light splitter disposed in the light emitting direction of the light source. The first aperture stop disposed between the light source and the first light splitter. The lens assembly is disposed between the first light splitter and the sample. The second aperture stop is disposed between the lens assembly and the first light splitter. The spectrum analyzer is disposed to at a side of the first light splitter opposite to the sample.

Abstract: A measurement system is configured to measure a surface structure of a sample. The surface of the sample has a thin film and a via, the depth of the via is larger than the thickness of the thin film. The measurement system includes a light source, a first light splitter, a first aperture stop, a lens assembly, a second aperture stop, a spectrum analyzer and an analysis module. The first light splitter disposed in the light emitting direction of the light source. The first aperture stop disposed between the light source and the first light splitter. The lens assembly is disposed between the first light splitter and the sample. The second aperture stop is disposed between the lens assembly and the first light splitter. The spectrum analyzer is disposed to at a side of the first light splitter opposite to the sample.

Abstract: A system for constructing a high dynamic range image includes a light generating device, a reflective mirror device, a controller, an image capturing device and an image processing module. The light generating device generates a light beam. The reflective mirror device directs the light beam to an object. The controller generates an intensity controlling signal for controlling the light generating device to modulate an intensity of the light beam in accordance with illuminating parameters, and to generate a direction controlling signal for controlling a reflection direction of the reflective mirror device. The image capturing device obtains an original image of the object or a modulated image of the object. The image processing module analyzes the original image to generate the illuminating parameters, or to construct a high dynamic range image of the object in accordance with the modulated image and the illuminating parameters.