Patents by Inventor Chien-Shien Tzou

Chien-Shien Tzou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conductive biasing member for metal layering
    Patent number: 6444101
    Abstract: A contact ring applies electroplating to a substrate having an electrically conductive portion. The contact ring comprises an annular insulative body, a conductive biasing member, and a seal member. The annular insulative body defines a central opening. The conductive biasing member is configured to exert a biasing force upon the substrate.
    Type: Grant
    Filed: November 12, 1999
    Date of Patent: September 3, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Joseph Stevens, Norman Cowan, Chien-Shien Tzou
  • CONDUCTIVE BIASING MEMBER FOR METAL LAYERING
    Publication number: 20020029962
    Abstract: A contact ring applies electroplating to a substrate having an electrically conductive portion. The contact ring comprises an annular insulative body, a conductive biasing member, and a seal member. The annular insulative body defines a central opening. The conductive biasing member is configured to exert a biasing force upon the substrate.
    Type: Application
    Filed: November 12, 1999
    Publication date: March 14, 2002
    Inventors: JOSEPH STEVENS, NORMAN COWAN, CHIEN-SHIEN TZOU