Abstract: The embodiments described herein are directed to a method for reducing fin oxidation during the formation of fin isolation regions. The method includes providing a semiconductor substrate with an n-doped region and a p-doped region formed on a top portion of the semiconductor substrate; epitaxially growing a first layer on the p-doped region; epitaxially growing a second layer different from the first layer on the n-doped region; epitaxially growing a third layer on top surfaces of the first and second layers, where the third layer is thinner than the first and second layers. The method further includes etching the first, second, and third layers to form fin structures on the semiconductor substrate and forming an isolation region between the fin structures.

Abstract: An apparatus combining the tests of lubrication systems with performance of rolling bearings is disclosed. The functions include the regulation of axial load and lubrication system and measurement of temperature rise and friction torque of test bearing which are provided to analyze the performance of test bearing under different axial loads, rotating speed and lubrication conditions. The test apparatus consists of loading, testing, linking, power, and base sections. In the loading section, a disc spring can be compressed by an adjustable screw to make up a mechanism for changing axial load on the test bearing. The testing section includes a thermocouple and a mechanism for measurement of friction torque of bearing. The outside of testing section has a protective sleeve for setting holes and pads which are adapted to fix, change and regulate the position, number, and outlet displacement of lubricant nozzles according to different lubrication systems and the actual testing needs.

Abstract: A configuration of lubrication nozzle including a large flow path to connect external oil supply tube with semi-circle cross section annular flow path, and three jet flow conduits with L form having interval of 120.degree. between adjacent channels to link annular flow path and outlet is created for oil-air or oil-mist lubrication system for high speed rolling-element bearings.