Patents by Inventor Chih-Fen CHEN

Chih-Fen CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240126861
    Abstract: A device unlocking method and an electronic device are provided. The method includes: detecting fingerprint information of a user by a first sensor of the electronic device; authenticating the fingerprint information and temporarily storing an authentication result of the fingerprint information; after authenticating the fingerprint information, detecting operation environment information related to the electronic device by a second sensor of the electronic device; and in response to the operation environment information meeting a default condition, unlocking the electronic device according to the authentication result.
    Type: Application
    Filed: May 9, 2023
    Publication date: April 18, 2024
    Applicant: ASUSTeK COMPUTER INC.
    Inventors: Chih-Hsien Yang, Hui-Fen Chen, I-Hsi Wu
  • Patent number: 11610825
    Abstract: In a method for semiconductor processing, a semiconductor substrate is provided. The semiconductor substrate defines at least one first trench therein. The at least one first trench has a first depth (d1). A coating layer is deposited onto the semiconductor substrate using at least one precursor under a setting for a processing temperature (T). The coating layer defines at least one second trench having a second depth (d2) above the at least one first trench. A first depth parameter (t) of the second depth (d2) relative to the first depth (d1) is determined. The processing temperature (T) is then determined based on the first depth parameter (t).
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: March 21, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang, Chui-Ya Peng
  • Patent number: 11411108
    Abstract: A semiconductor device includes a gate stack over a semiconductor substrate. A spacer extends along a first sidewall of the gate stack. An epitaxy structure is in the semiconductor substrate. A liner wraps around the epitaxy structure and has an outer surface in contact with the semiconductor substrate and an inner surface facing the epitaxy structure. The outer surface of the liner has a first facet extending upwards and towards the gate stack from a bottom of the first liner and a second facet extending upwards and towards an outer sidewall of the spacer from a top of the first facet to a top of the liner, such that a corner is formed between the first facet and the second facet, and the inner surface of the first liner defines a first curved corner pointing towards the corner formed between the first facet and the second facet.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: August 9, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen Chen, Chui-Ya Peng, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan
  • Publication number: 20210043771
    Abstract: A semiconductor device includes a gate stack over a semiconductor substrate. A spacer extends along a first sidewall of the gate stack. An epitaxy structure is in the semiconductor substrate. A liner wraps around the epitaxy structure and has an outer surface in contact with the semiconductor substrate and an inner surface facing the epitaxy structure. The outer surface of the liner has a first facet extending upwards and towards the gate stack from a bottom of the first liner and a second facet extending upwards and towards an outer sidewall of the spacer from a top of the first facet to a top of the liner, such that a corner is formed between the first facet and the second facet, and the inner surface of the first liner defines a first curved corner pointing towards the corner formed between the first facet and the second facet.
    Type: Application
    Filed: October 23, 2020
    Publication date: February 11, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen CHEN, Chui-Ya PENG, Ching YU, Pin-Hen LIN, Yen CHUANG, Yuh-Ta FAN
  • Publication number: 20210043524
    Abstract: In a method for semiconductor processing, a semiconductor substrate is provided. The semiconductor substrate defines at least one first trench therein. The at least one first trench has a first depth (d1). A coating layer is deposited onto the semiconductor substrate using at least one precursor under a setting for a processing temperature (T). The coating layer defines at least one second trench having a second depth (d2) above the at least one first trench. A first depth parameter (t) of the second depth (d2) relative to the first depth (d1) is determined. The processing temperature (T) is then determined based on the first depth parameter (t).
    Type: Application
    Filed: October 26, 2020
    Publication date: February 11, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang, Chui-Ya Peng
  • Patent number: 10818563
    Abstract: In a method for semiconductor processing, a semiconductor substrate is provided. The semiconductor substrate defines at least one first trench therein. The at least one first trench has a first depth (d1). A coating layer is deposited onto the semiconductor substrate using at least one precursor under a setting for a processing temperature (T). The coating layer defines at least one second trench having a second depth (d2) above the at least one first trench. A first depth parameter (t) of the second depth (d2) relative to the first depth (d1) is determined. The processing temperature (T) is then determined based on the first depth parameter (t).
    Type: Grant
    Filed: November 26, 2019
    Date of Patent: October 27, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang, Chui-Ya Peng
  • Patent number: 10818790
    Abstract: A semiconductor device includes a gate stack over a semiconductor substrate. A spacer extends substantially along a first sidewall of the gate stack. An epitaxy structure is in the semiconductor substrate. A liner wraps around the epitaxy structure and has an outer surface in contact with the semiconductor substrate and an inner surface facing the epitaxy structure. The outer surface of the liner has a first facet extending upwards and towards the gate stack from a bottom of the first liner and a second facet extending upwards and towards an outer sidewall of the spacer from a top of the first facet to a top of the liner, such that a corner is formed between the first facet and the second facet, and the inner surface of the first liner defines a first curved corner pointing towards the corner formed between the first facet and the second facet.
    Type: Grant
    Filed: June 7, 2019
    Date of Patent: October 27, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen Chen, Chui-Ya Peng, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan
  • Publication number: 20200098650
    Abstract: In a method for semiconductor processing, a semiconductor substrate is provided. The semiconductor substrate defines at least one first trench therein. The at least one first trench has a first depth (d1). A coating layer is deposited onto the semiconductor substrate using at least one precursor under a setting for a processing temperature (T). The coating layer defines at least one second trench having a second depth (d2) above the at least one first trench. A first depth parameter (t) of the second depth (d2) relative to the first depth (d1) is determined. The processing temperature (T) is then determined based on the first depth parameter (t).
    Type: Application
    Filed: November 26, 2019
    Publication date: March 26, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang, Chui-Ya Peng
  • Patent number: 10515861
    Abstract: In a method for semiconductor processing, a semiconductor substrate is provided. The semiconductor substrate defines at least one first trench therein. The at least one first trench has a first depth (d1). A coating layer is deposited onto the semiconductor substrate using at least one precursor under a setting for a processing temperature (T). The coating layer defines at least one second trench having a second depth (d2) above the at least one first trench. A depth parameter (t) the second depth (d2) relative to the first depth (d1) is determined. The processing temperature (T) is then determined based on a pre-determined standard reference curve comprising a plurality of references depth parameters in a first range as a function of a plurality of reference processing temperatures in a second range.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: December 24, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang, Chui-Ya Peng
  • Publication number: 20190312144
    Abstract: A semiconductor device includes a gate stack over a semiconductor substrate. A spacer extends substantially along a first sidewall of the gate stack. An epitaxy structure is in the semiconductor substrate. A liner wraps around the epitaxy structure and has an outer surface in contact with the semiconductor substrate and an inner surface facing the epitaxy structure. The outer surface of the liner has a first facet extending upwards and towards the gate stack from a bottom of the first liner and a second facet extending upwards and towards an outer sidewall of the spacer from a top of the first facet to a top of the liner, such that a corner is formed between the first facet and the second facet, and the inner surface of the first liner defines a first curved corner pointing towards the corner formed between the first facet and the second facet.
    Type: Application
    Filed: June 7, 2019
    Publication date: October 10, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen CHEN, Chui-Ya PENG, Ching YU, Pin-Hen LIN, Yen CHUANG, Yuh-Ta FAN
  • Patent number: 10319857
    Abstract: A semiconductor device includes a substrate, a liner, and an epitaxy structure. The substrate has a recess. The liner is disposed in the recess. The liner is denser than the substrate. The epitaxy structure is disposed in the recess. The liner is disposed between the epitaxy structure and the substrate.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: June 11, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen Chen, Chui-Ya Peng, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan
  • Publication number: 20190035697
    Abstract: In a method for semiconductor processing, a semiconductor substrate is provided. The semiconductor substrate defines at least one first trench therein. The at least one first trench has a first depth (d1). A coating layer is deposited onto the semiconductor substrate using at least one precursor under a setting for a processing temperature (T). The coating layer defines at least one second trench having a second depth (d2) above the at least one first trench. A depth parameter (t) the second depth (d2) relative to the first depth (d1) is determined. The processing temperature (T) is then determined based on a pre-determined standard reference curve comprising a plurality of references depth parameters in a first range as a function of a plurality of reference processing temperatures in a second range.
    Type: Application
    Filed: March 29, 2018
    Publication date: January 31, 2019
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang, Chui-Ya Peng
  • Publication number: 20180069120
    Abstract: A semiconductor device includes a substrate, a liner, and an epitaxy structure. The substrate has a recess. The liner is disposed in the recess. The liner is denser than the substrate. The epitaxy structure is disposed in the recess. The liner is disposed between the epitaxy structure and the substrate.
    Type: Application
    Filed: October 30, 2017
    Publication date: March 8, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen CHEN, Chui-Ya PENG, Ching YU, Pin-Hen LIN, Yen CHUANG, Yuh-Ta FAN
  • Patent number: 9812570
    Abstract: A semiconductor device includes a substrate, a liner, and an epitaxy structure. The substrate has a recess. The liner is disposed in the recess. The liner is denser than the substrate. The epitaxy structure is disposed in the recess. The liner is disposed between the epitaxy structure and the substrate.
    Type: Grant
    Filed: June 30, 2015
    Date of Patent: November 7, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen Chen, Chui-Ya Peng, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan
  • Patent number: 9780209
    Abstract: A semiconductor device includes a substrate, a gate stack, at least one epitaxy structure, a dielectric material, and a contact. The gate stack is present on the substrate. The gate spacer is present on a sidewall of the gate stack. The epitaxy structure is partially present in the substrate. The dielectric material is present on the substrate and between the epitaxy structure and the gate spacer. The contact is present on the epitaxy structure, the dielectric material, and the gate spacer.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: October 3, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Fen Chen, Bang-Yu Huang, Chui-Ya Peng
  • Publication number: 20170005196
    Abstract: A semiconductor device includes a substrate, a liner, and an epitaxy structure. The substrate has a recess. The liner is disposed in the recess. The liner is denser than the substrate. The epitaxy structure is disposed in the recess. The liner is disposed between the epitaxy structure and the substrate.
    Type: Application
    Filed: June 30, 2015
    Publication date: January 5, 2017
    Inventors: Chih-Fen CHEN, Chui-Ya PENG, Ching YU, Pin-Hen LIN, Yen CHUANG, Yuh-Ta FAN