Abstract: A chuck vacuum line of a semiconductor processing tool includes a first portion that penetrates a sidewall of a main pumping line of the semiconductor processing tool. The chuck vacuum line includes a second portion that is substantially parallel to the sidewall of the main pumping line and to a direction of flow in the main pumping line. A size of the second portion increases between an inlet end of the second portion and an outlet end of the second portion along the direction of flow in the main pumping line.

Abstract: An improved key holder includes a seat with curved edges and three corners, a plurality of key-rings, and a push button at the center of the seat. The key-rings have notches and indentations. The push button has insert plates that may engage the notches of the key-rings. A reset spring is disposed below the push button. Chambers accommodating balls and springs are disposed in the corners of the seat for positioning the indentations of the key-rings. The key-rings may hold more keys and allow easy insertion or removal of keys. Besides, the key holder may be attached to the user's clothing or accessories.