Patents by Inventor Chih-Wen (Albert) Yao

Chih-Wen (Albert) Yao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10680019
    Abstract: Some embodiments of the present disclosure relate to a method of forming a transistor. The method includes forming a gate dielectric over a substrate and forming a gate over the gate dielectric. The gate includes polysilicon extending between a first outermost sidewall and a second outermost sidewall of the gate. A mask is formed over the gate. The mask exposes a first gate region extending to the first outermost sidewall and covers a second gate region extending between the first gate region and the second outermost sidewall. Dopants are selectively implanted into the first gate region according to the mask. Source and drain regions are formed within the substrate. The source region and the drain region are asymmetric with respect to an interface of the first gate region and the second gate region and extend to substantially equal distances past the first and second outermost sidewalls of the gate, respectively.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: June 9, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chen-Liang Chu, Chih-Wen Albert Yao, Ruey-Hsin Liu, Ming-Ta Lei
  • Publication number: 20190237485
    Abstract: Some embodiments of the present disclosure relate to a method of forming a transistor. The method includes forming a gate dielectric over a substrate and forming a gate over the gate dielectric. The gate includes polysilicon extending between a first outermost sidewall and a second outermost sidewall of the gate. A mask is formed over the gate. The mask exposes a first gate region extending to the first outermost sidewall and covers a second gate region extending between the first gate region and the second outermost sidewall. Dopants are selectively implanted into the first gate region according to the mask. Source and drain regions are formed within the substrate. The source region and the drain region are asymmetric with respect to an interface of the first gate region and the second gate region and extend to substantially equal distances past the first and second outermost sidewalls of the gate, respectively.
    Type: Application
    Filed: April 12, 2019
    Publication date: August 1, 2019
    Inventors: Chen-Liang Chu, Chih-Wen Albert Yao, Ruey-Hsin Liu, Ming-Ta Lei
  • Patent number: 10276596
    Abstract: Some embodiments of the present disclosure relate to deceasing off-state leakage current within a metal-oxide-semiconductor field-effect transistor (MOSFET). The MOSFET includes source and drain regions. The source and drain regions are separated by a channel region. A gate is arranged over the channel region. The gate has a first gate region adjacent to the source region and a second gate region adjacent to the drain region. The first gate region is selectively doped adjacent the source region. The second gate region is undoped or lightly-doped. The undoped or lightly-doped second gate region reduces the electric field between the gate and the drain region, and hence reduces a gate induced drain leakage (GIDL) current between the gate and drain region. The undoped or lightly-doped region of the gate can reduce the GIDL current within the MOSFET by about three orders of magnitude. Other embodiments are also disclosed.
    Type: Grant
    Filed: August 6, 2014
    Date of Patent: April 30, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chen-Liang Chu, Chih-Wen Albert Yao, Ruey-Hsin Liu, Ming-Ta Lei
  • Patent number: 10164037
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate having a top surface, a source region, and a drain region. The semiconductor device structure includes a gate structure over the top surface and extending into the semiconductor substrate. The gate structure in the semiconductor substrate is between the source region and the drain region and separates the source region from the drain region. The semiconductor device structure includes an isolation structure in the semiconductor substrate and surrounding the source region, the drain region, and the gate structure in the semiconductor substrate.
    Type: Grant
    Filed: March 31, 2017
    Date of Patent: December 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ker-Hsiao Huo, Kong-Beng Thei, Chih-Wen Albert Yao, Fu-Jier Fan, Chen-Liang Chu, Ta-Yuan Kung, Yi-Huan Chen, Yu-Bin Zhao, Ming-Ta Lei, Li-Hsuan Yeh
  • Publication number: 20180286960
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate having a top surface, a source region, and a drain region. The semiconductor device structure includes a gate structure over the top surface and extending into the semiconductor substrate. The gate structure in the semiconductor substrate is between the source region and the drain region and separates the source region from the drain region. The semiconductor device structure includes an isolation structure in the semiconductor substrate and surrounding the source region, the drain region, and the gate structure in the semiconductor substrate.
    Type: Application
    Filed: March 31, 2017
    Publication date: October 4, 2018
    Inventors: Ker-Hsiao HUO, Kong-Beng THEI, Chih-Wen Albert YAO, Fu-Jier FAN, Chen-Liang CHU, Ta-Yuan KUNG, Yi-Huan CHEN, Yu-Bin ZHAO, Ming-Ta LEI, Li-Hsuan YEH
  • Patent number: 9466681
    Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.
    Type: Grant
    Filed: June 12, 2015
    Date of Patent: October 11, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Liang Chu, Fei-Yun Chen, Chih-Wen Albert Yao
  • Patent number: 9343465
    Abstract: Some embodiments of the present disclosure are directed to an embedded flash (e-flash) memory device that includes a flash memory cell and a metal-oxide-semiconductor field-effect transistor (MOSFET). The flash memory cell includes a control gate disposed over a floating gate. The MOSFET includes a logic gate disposed over a gate dielectric. The floating gate and a first gate layer of the logic gate are simultaneously formed with a first polysilicon layer. A high temperature oxide (HTO) is then formed over the floating gate with a high temperature process, while the first gate layer protects the gate dielectric from degradation effects due to the high temperature process. A second gate layer of the logic gate is then formed over the first gate layer by a second polysilicon layer. The first and second gate layers collectively form a logic gate of the MOSFET.
    Type: Grant
    Filed: August 29, 2014
    Date of Patent: May 17, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chen-Liang Chu, Ruey-Hsin Liu, Chih-Wen Albert Yao, Ming-Ta Lei
  • Publication number: 20160064394
    Abstract: Some embodiments of the present disclosure are directed to an embedded flash (e-flash) memory device that includes a flash memory cell and a metal-oxide-semiconductor field-effect transistor (MOSFET). The flash memory cell includes a control gate disposed over a floating gate. The MOSFET includes a logic gate disposed over a gate dielectric. The floating gate and a first gate layer of the logic gate are simultaneously formed with a first polysilicon layer. A high temperature oxide (HTO) is then formed over the floating gate with a high temperature process, while the first gate layer protects the gate dielectric from degradation effects due to the high temperature process. A second gate layer of the logic gate is then formed over the first gate layer by a second polysilicon layer. The first and second gate layers collectively form a logic gate of the MOSFET.
    Type: Application
    Filed: August 29, 2014
    Publication date: March 3, 2016
    Inventors: Chen-Liang Chu, Ruey-Hsin Liu, Chih-Wen Albert Yao, Ming-Ta Lei
  • Patent number: 8587073
    Abstract: Provided is a semiconductor device. The semiconductor device includes a resistor and a voltage protection device. The resistor has a spiral shape. The resistor has a first portion and a second portion. The voltage protection device includes a first doped region that is electrically coupled to the first portion of the resistor. The voltage protection device includes a second doped region that is electrically coupled to the second portion of the resistor. The first and second doped regions have opposite doping polarities.
    Type: Grant
    Filed: October 15, 2010
    Date of Patent: November 19, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen (Albert) Yao, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai
  • Publication number: 20120091529
    Abstract: Provided is a semiconductor device. The semiconductor device includes a resistor and a voltage protection device. The resistor has a spiral shape. The resistor has a first portion and a second portion. The voltage protection device includes a first doped region that is electrically coupled to the first portion of the resistor. The voltage protection device includes a second doped region that is electrically coupled to the second portion of the resistor. The first and second doped regions have opposite doping polarities.
    Type: Application
    Filed: October 15, 2010
    Publication date: April 19, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen (Albert) Yao, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai
  • Patent number: 7928508
    Abstract: A semiconductor structure includes a semiconductor substrate; a first high-voltage well (HVW) region of a first conductivity type overlying the semiconductor substrate; a second HVW region of a second conductivity type opposite the first conductivity type overlying the substrate and laterally adjoining the first HVW region; a gate dielectric extending from over the first HVW region to over the second HVW region; a gate electrode on the gate dielectric; a drain region in the second HVW region; a source region at an opposite side of the gate dielectric than the drain region; and a deep well region of the first conductivity type underlying the second HVW region. Substantially no deep well region is formed directly underlying the drain region.
    Type: Grant
    Filed: April 15, 2008
    Date of Patent: April 19, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wen (Albert) Yao, Puo-Yu Chiang, Tsai Chun Lin, Tsung-Yi Huang
  • Patent number: 7781859
    Abstract: An integrated circuit structure includes a semiconductor substrate; a well region of a first conductivity type over the semiconductor substrate; a metal-containing layer on the well region, wherein the metal-containing layer and the well region form a Schottky barrier; an isolation region encircling the metal-containing layer; and a deep-well region of a second conductivity type opposite the first conductivity type under the metal-containing layer. The deep-well region has at least a portion vertically overlapping a portion of the metal-containing layer. The deep-well region is vertically spaced apart from the isolation region and the metal-containing layer by the well region.
    Type: Grant
    Filed: March 24, 2008
    Date of Patent: August 24, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Puo-Yu Chiang, Tsai Chun Lin, Chih-Wen (Albert) Yao, David Ho
  • Publication number: 20090256200
    Abstract: A semiconductor structure includes a semiconductor substrate; a first high-voltage well (HVW) region of a first conductivity type overlying the semiconductor substrate; a second HVW region of a second conductivity type opposite the first conductivity type overlying the substrate and laterally adjoining the first HVW region; a gate dielectric extending from over the first HVW region to over the second HVW region; a gate electrode on the gate dielectric; a drain region in the second HVW region; a source region at an opposite side of the gate dielectric than the drain region; and a deep well region of the first conductivity type underlying the second HVW region. Substantially no deep well region is formed directly underlying the drain region.
    Type: Application
    Filed: April 15, 2008
    Publication date: October 15, 2009
    Inventors: Chih-Wen (Albert) Yao, Puo-Yu Chiang, Tsai Chun Lin, Tsung-Yi Huang
  • Publication number: 20090236679
    Abstract: An integrated circuit structure includes a semiconductor substrate; a well region of a first conductivity type over the semiconductor substrate; a metal-containing layer on the well region, wherein the metal-containing layer and the well region form a Schottky barrier; an isolation region encircling the metal-containing layer; and a deep-well region of a second conductivity type opposite the first conductivity type under the metal-containing layer. The deep-well region has at least a portion vertically overlapping a portion of the metal-containing layer. The deep-well region is vertically spaced apart from the isolation region and the metal-containing layer by the well region.
    Type: Application
    Filed: March 24, 2008
    Publication date: September 24, 2009
    Inventors: Puo-Yu Chiang, Tsai Chun Lin, Chih-Wen Albert Yao, David Ho