Patents by Inventor Chih-Yao TING

Chih-Yao TING has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method of measuring surface topography
    Patent number: 11841218
    Abstract: Herein disclosed are a surface topography measuring system and a method thereof. The method comprises the following steps: dividing a test beam into a first sub-beam, entering a reflecting mirror along a first axis, and a second sub-beam, entering an object surface along a second axis; moving the reflecting mirror for reflecting the first sub-beam at different positions on the first axis to generate N reflected beams; generating an object reflected beam, related to the second sub-beam, reflected from the object surface; generating N images, related to the N reflected beams and the object reflected beam, and each of the N images having a plurality of interference fringes; analyzing the interference fringes in each of the N images to calculate N curve formulas; calculating a surface topography of the object surface from the N curve formulas.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: December 12, 2023
    Assignee: Chroma ATE Inc.
    Inventors: Shih-Yao Pan, Chih-Yao Ting, Chia-Hung Lin, Hsin-Yun Chang
  • SYSTEM AND METHOD OF MEASURING SURFACE TOPOGRAPHY
    Publication number: 20220018656
    Abstract: Herein disclosed are a surface topography measuring system and a method thereof. The method comprises the following steps: dividing a test beam into a first sub-beam, entering a reflecting mirror along a first axis, and a second sub-beam, entering an object surface along a second axis; moving the reflecting mirror for reflecting the first sub-beam at different positions on the first axis to generate N reflected beams; generating an object reflected beam, related to the second sub-beam, reflected from the object surface; generating N images, related to the N reflected beams and the object reflected beam, and each of the N images having a plurality of interference fringes; analyzing the interference fringes in each of the N images to calculate N curve formulas; calculating a surface topography of the object surface from the N curve formulas.
    Type: Application
    Filed: July 16, 2021
    Publication date: January 20, 2022
    Inventors: Shih-Yao PAN, Chih-Yao TING, Chia-Hung LIN, Hsin-Yun CHANG