Patents by Inventor Chikako Honma

Chikako Honma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method
    Patent number: 11946470
    Abstract: An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including: a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.
    Type: Grant
    Filed: March 13, 2018
    Date of Patent: April 2, 2024
    Assignee: EBARA CORPORATION
    Inventors: Keiji Maishigi, Tetsuro Sugiura, Katsuaki Usui, Masahiro Hatakeyama, Chikako Honma, Toru Osuga, Koichi Iwasaki, Jie Yuan Lin
  • INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, PROGRAM, SUBSTRATE PROCESSING APPARATUS, CRITERION DATA DETERMINATION APPARATUS, AND CRITERION DATA DETERMINATION METHOD
    Publication number: 20240077079
    Abstract: An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including: a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.
    Type: Application
    Filed: November 14, 2023
    Publication date: March 7, 2024
    Inventors: Keiji MAISHIGI, Tetsuro SUGIURA, Katsuaki USUI, Masahiro HATAKEYAMA, Chikako HONMA, Toru OSUGA, Koichi IWASAKI, Jie Yuan LIN
  • INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, PROGRAM, SUBSTRATE PROCESSING APPARATUS, CRITERION DATA DETERMINATION APPARATUS, AND CRITERION DATA DETERMINATION METHOD
    Publication number: 20200109712
    Abstract: An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including: a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.
    Type: Application
    Filed: March 13, 2018
    Publication date: April 9, 2020
    Inventors: Keiji Maishigi, Tetsuro Sugiura, Katsuaki Usui, Masahiro Hatakeyama, Chikako Honma, Toru Osuga, Koichi Iwasaki, Jie Yuan Lin