Patents by Inventor Chikako Takatou

Chikako Takatou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing method using fast atom beam
    Patent number: 5677011
    Abstract: There are disclosed a processing method and a processing apparatus using a fast atom beam to process a micro-sized structure on a desired face and portion of a workpiece having a complex shape. In this invention, an electron beam and/or a focused ion beam is applied to a surface of a workpiece to produce a masking film layer on the workpiece. After that, a fast atom beam is applied to the workpiece remove the surface layer of the workpiece where the masking film layer is not formed.
    Type: Grant
    Filed: August 2, 1996
    Date of Patent: October 14, 1997
    Assignee: Ebara Corporation
    Inventors: Masahiro Hatakeyama, Chikako Takatou