Abstract: Longitudinally collapsible apparatus for compacting packing material within a tubular liquid chromatography column. The apparatus includes a first support member, a second support member and a movable support member. The movable support member is releasably connectable to the second support member for support thereby. When released from the second support member, the movable member is adapted to ride on guide members extending between the first and second support members. A compression mechanism is supported on the movable support member to move therewith to a longitudinally collapsed position for the apparatus. The compression mechanism comprises a reversible drive for an axially movable rod carrying a movable piston. With the movable support member secured to the second support member, the piston of the compression mechanism is movable in an end of the tubular column when the column is supported on the first support member.

Abstract: A method for achieving greater uniformity and control in vapor phase etching of silicon, silicon oxide layers and related materials associated with wafers used for semiconductor devices comprises the steps of first cleaning the wafer surface to remove organics, followed by vapor phase etching. An integrated apparatus for cleaning organic and, subsequently, vapor phase etching, is also described.In embodiments of the invention cooling steps are incorporated to increase throughput, an on-demand vaporizer is provided to repeatably supply vapor at other than azeotropic concentration, and a residue-free etch process is provided.

Abstract: Longitudinally collapsible apparatus for compacting packing material within a tubular liquid chromatography column. The apparatus includes a first support member, a second support member and a movable support member. The movable support member is releasably connectable to the second support member for support thereby. When released from the second support member, the movable member is adapted to ride on guide members extending between the first and second support members. A compression mechanism is supported on the movable support member to mote therewith to a longitudinally collapsed position for the apparatus. The compression mechanism comprises a reversible drive for an axially movable rod carrying a movable piston. With the movable support member secured to the second support member, the piston of the compression mechanism is movable in an end of the tubular column when the column is supported on the first support member.

Abstract: Described herein is an apparatus and method for delivering fluid components for semiconductor processes such as chemical vapor deposition (CVD) and chemical etch processes. Any prescribed mixture of separate fluid reagents can be delivered with extreme accuracy and precision using the apparatus we describe here. The unique embodiment of a precision fluid pumping system utilizing internal pressure and temperature transducers, capacity volume and restrictive elements that comprise a continuous pulse-free system for use in CVD applications. This system has superior performance characteristics in the areas of: accuracy, precision, repeatability of the fluid mixture delivery and continuous repeatable delivery without intermittent pulsation. We describe a novel fluid pump whose design is integrated using a closed loop feedback system composed of temperature and pressure sensors. This allows the entire system to perform to in either an isobaric-isothermal mode or an isocratic-isothermal mode.

Abstract: A multichannel pump system for HPLC and other uses has a plurality of fluid pumps whose input is fed separately to at least one high pressure mixing unit downstream of the pumps and any associated items such as pulse dampeners and pressure transducers. A pump controller is connected to control each of the pumps separately in a coordinated manner to provide a plurality of operational modes. The operational modes include an isocratic mode, in which optionally the output of solvent of like composition from two or more pumps is pooled to provide increased output capacity, as well as binary, ternary, etc., gradient modes in which different solvents are selectively mixed before being applied to an analytical unit such as an HPLC column. The pump system further includes a novel linear drive pump having interchangeable piston modules providing different ranges of flow rates. The linear drive pump is capable of providing precise solvent delivery at high pressure for flow rates from 20 ml/minute down to 0.