Abstract: A position detection and determination device and a position calibration device and method are provided. The position detection and determination device includes a standard positioning pin position limiting component configured to limit standard position information of a positioning pin of a load port of a silicon wafer pod; a positioning pin position detecting component configured to detect real-time position information of the positioning pin of the load port of the silicon wafer pod; and a determining module configured to obtain the standard position information and the real-time position information, and determine whether the position of the positioning pin of the load port of the silicon wafer pod is accurate or not according to the standard position information and the real-time position information.

Abstract: An upper lid alignment apparatus for hatchback reaction cabin includes at least three sets of mating members. Each mating member has a protruding active member located on a side wall of an upper lid and a receiving member located on a side wall of a table. The receiving member has a guide slope to guide the active member to slide and reset on an anchor spot on the receiving member. The upper lid hence may make closed contact with the table to form a sealed cabin for reaction process.