Patents by Inventor Chiou T. Chen

Chiou T. Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5196400
    Abstract: A target which is a good conductor of heat and electricity is plasma sprayed with a weakly conducting material such as a metallic oxide. The target is then employed in a magnetron sputtering apparatus to sputter the material sprayed onto the target onto a substrate. The technique permits use of power densities and target sizes and shapes which are advantageous for sputtering substrates having large surface areas.
    Type: Grant
    Filed: August 17, 1990
    Date of Patent: March 23, 1993
    Assignee: AT&T Bell Laboratories
    Inventors: Chiou T. Chen, Dennis L. Krause