Abstract: A flap position sensing device of an active air flap system, and a method of manufacturing the same are described. The flap position sensing device includes a rotating body, a sensor casing, a first hall sensor and a second hall sensor, and a first permanent magnet and a second permanent magnet. The rotating body is formed of a resin material, and rotates the flap by receiving torque while the rotating body is coaxially fixed to a rotation shaft of the flap. The sensor casing is formed of a resin material, and is fixed to the housing to rotatably support the rotating body. The first hall sensor and the second hall sensor are integrally formed with the sensor casing by injection molding, and are disposed corresponding to an open position and a closed position, respectively, of the flap.

Abstract: A flap position sensing device of an active air flap system, and a method of manufacturing the same are described. The flap position sensing device includes a rotating body, a sensor casing, a first hall sensor and a second hall sensor, and a first permanent magnet and a second permanent magnet. The rotating body is formed of a resin material, and rotates the flap by receiving torque while the rotating body is coaxially fixed to a rotation shaft of the flap. The sensor casing is formed of a resin material, and is fixed to the housing to rotatably support the rotating body. The first hall sensor and the second hall sensor are integrally formed with the sensor casing by injection molding, and are disposed corresponding to an open position and a closed position,respectively, of the flap.

Abstract: An anti-freezing apparatus comprises: a main block including an accommodation space and a water inlet at one side thereof to communicate with the accommodation space; a temperature sensitive member provided in the accommodation space and having one end for opening and closing the water inlet, the length of the temperature sensitive member variable due to expansion or contraction according to changes in temperature; an elastic member installed between the temperature sensitive member and the main block; a connecting rod connected to the other end of the temperature sensitive member; a locking part having opposite ends locked in a locking protrusion formed in the accommodation space and having a through-hole through which water passes; and an adjustment part coupled to the tip end of the connecting rod and rotatably screw-coupled to the locking part. The elastic member applies an elastic force to the temperature sensitive member to close the water inlet.

Abstract: An anti-freezing apparatus comprises: a main block including an accommodation space and a water inlet at one side thereof to communicate with the accommodation space; a temperature sensitive member provided in the accommodation space and having one end for opening and closing the water inlet, the length of the temperature sensitive member variable due to expansion or contraction according to changes in temperature; an elastic member installed between the temperature sensitive member and the main block; a connecting rod connected to the other end of the temperature sensitive member; a locking part having opposite ends locked in a locking protrusion formed in the accommodation space and having a through-hole through which water passes; and an adjustment part coupled to the tip end of the connecting rod and rotatably screw-coupled to the locking part. The elastic member applies an elastic force to the temperature sensitive member to close the water inlet.

Abstract: This invention relates to a ceramic composition, which is suitable for use in DOC and DPF for removing nitrogen oxide, carbon monoxide and unburned particles from exhaust gas systems of vehicles or for use in a thermistor temperature sensor for an industrial high-temperature environment similar thereto, and to a thermistor device manufactured using the composition. The ceramic composition is prepared by adding a perovskite phase having a perovskite crystalline structure represented by ABO3 with Sn of Group 4B or Sb or Bi of Group 5B, wherein A includes at least one element selected from among Groups 2A and 3A elements except for LA, and B includes at least one element selected from among transition metals of Groups 4A, 5A, 6A, 7A, 8A, 2B and 3B.

Abstract: Provided is a spin head supporting a substrate and rotating the substrate. The spin head includes a body, chuck pins installed on the body and moving between supporting positions where a substrate is supported and waiting positions providing space for loading/unloading of the substrate, and a chuck pin moving unit configured to move the chuck pins. The chuck pin moving unit includes a rotation rod coupled with each of the chuck pins, a pivot pin fixing the rotation rod to the body, and a driving member rotating the rotation rod about the pivot pin as a rotation shaft to move the chuck pin from the supporting position to the waiting position. When the body rotates, the rotation rod uses reverse centrifugal force to apply force to the chuck pin from the waiting position to the supporting position. The chuck pins include first pins and second pins that alternately chuck a substrate during a process.

Abstract: A substrate processing apparatus includes a main load unit, a buffer load unit, and a transfer unit. Containers each accommodating substrates are placed on the main load unit and the buffer load unit. The buffer load unit is disposed above the main load unit and movable into and outward from a process module. Therefore, more containers can be placed in the substrate processing apparatus without increasing the footprint of the substrate processing apparatus, and thus it is possible to reduce equipment idle time during which standby substrates wait before being processed, thereby improving productivity.

Abstract: Provided is a spin head supporting a substrate and rotating the substrate. The spin head includes a body, chuck pins installed on the body and moving between supporting positions where a substrate is supported and waiting positions providing space for loading/unloading of the substrate, and a chuck pin moving unit configured to move the chuck pins. The chuck pin moving unit includes a rotation rod coupled with each of the chuck pins, a pivot pin fixing the rotation rod to the body, and a driving member rotating the rotation rod about the pivot pin as a rotation shaft to move the chuck pin from the supporting position to the waiting position. When the body rotates, the rotation rod uses reverse centrifugal force to apply force to the chuck pin from the waiting position to the supporting position. The chuck pins include first pins and second pins that alternately chuck a substrate during a process.

Abstract: A substrate processing apparatus includes a main load unit, a buffer load unit, and a transfer unit. Containers each accommodating substrates are placed on the main load unit and the buffer load unit. The buffer load unit is disposed above the main load unit and movable into and outward from a process module. Therefore, more containers can be placed in the substrate processing apparatus without increasing the footprint of the substrate processing apparatus, and thus it is possible to reduce equipment idle time during which standby substrates wait before being processed, thereby improving productivity.

Abstract: Provided are an ozonated water mixture supply apparatus and method, and a substrate treating facility that receives an ozonated water mixture from the apparatus to treat a substrate. The ozonated water mixture supply apparatus includes a mixing line and distribution lines. The mixing line respectively receives a treating liquid and an ozonated water from a treating liquid supply line and an ozonated water supply line and mixes the treating liquid and the ozonated water to generate the ozonated water mixture satisfying a previously set concentration. Each of the distribution lines distributes the ozonated water mixture generated from the mixing line into a process unit. The mixing line includes a mixing valve and a static mixer. Therefore, the ozonated water mixture having the previously set concentration is generated and supplied using an in-line mixing method without requiring a mixing vessel such as a mixing tank.