Patents by Inventor Chor Shu Cheng

Chor Shu Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11942415
    Abstract: A device may include a substrate, and an interlevel dielectric arranged over the substrate. The interlevel dielectric may include a first interlevel dielectric layer in an interconnect level i, the first interlevel dielectric layer having a first interconnect and a second interconnect therein. A nitride block insulator may be arranged over the first interlevel dielectric layer and over the first interconnect and the second interconnect. An opening may be arranged in the nitride block insulator, the opening extending through the nitride block insulator to expose a surface of the first interconnect in the first interlevel dielectric layer. A contact plug may be arranged in the opening of the nitride block insulator. The contact plug at least lines the opening and prevents out-diffusion of conductive material from the first interconnect. A thin film of a passive component may be arranged over the nitride block insulator and over the contact plug.
    Type: Grant
    Filed: August 16, 2022
    Date of Patent: March 26, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Handoko Linewih, Chor Shu Cheng, Tze Ho Simon Chan, Yudi Setiawan
  • Patent number: 11935678
    Abstract: An inductive device may be provided, including a first winding layer, a second winding layer arranged over the first winding layer and connected to the first winding layer to form a plurality of turns around a first axis, and a magnetic core arranged vertically between the first winding layer and the second winding layer. The magnetic core may include a portion entirely over the first winding layer and entirely under the second winding layer, where this portion may include a magnetic segment and a non-magnetic segment arranged laterally adjacent to each other along the first axis.
    Type: Grant
    Filed: December 10, 2020
    Date of Patent: March 19, 2024
    Assignee: GLOBALFOUNDARIES SINGAPORE Pte. Ltd.
    Inventors: Zishan Ali Syed Mohammed, Lulu Peng, Chor Shu Cheng, Yong Chau Ng, Lawrence Selvaraj Susai
  • Patent number: 11538751
    Abstract: A semiconductor device is provided. The semiconductor device comprises an inductor in a far back end of line layer and a capacitor adjacent to and electrically coupled with the inductor. The capacitor comprises a first electrode layer arranged over sidewalls and a bottom surface of a via in a first insulating layer A dielectric layer is provided over the first electrode layer. A second electrode layer is provided over the dielectric layer and a metal fill layer is provided over the second electrode layer. The metal fill layer has a top surface at least level with a top surface of the first insulating layer.
    Type: Grant
    Filed: September 3, 2020
    Date of Patent: December 27, 2022
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Lulu Peng, Nur Aziz Yosokumoro, Zishan Ali Syed Mohammed, Lawrence Selvaraj Susai, Chor Shu Cheng, Yong Chau Ng
  • Publication number: 20220392837
    Abstract: A device may include a substrate, and an interlevel dielectric arranged over the substrate. The interlevel dielectric may include a first interlevel dielectric layer in an interconnect level i, the first interlevel dielectric layer having a first interconnect and a second interconnect therein. A nitride block insulator may be arranged over the first interlevel dielectric layer and over the first interconnect and the second interconnect. An opening may be arranged in the nitride block insulator, the opening extending through the nitride block insulator to expose a surface of the first interconnect in the first interlevel dielectric layer. A contact plug may be arranged in the opening of the nitride block insulator. The contact plug at least lines the opening and prevents out-diffusion of conductive material from the first interconnect. A thin film of a passive component may be arranged over the nitride block insulator and over the contact plug.
    Type: Application
    Filed: August 16, 2022
    Publication date: December 8, 2022
    Inventors: Handoko LINEWIH, Chor Shu CHENG, Tze Ho Simon CHAN, Yudi SETIAWAN
  • Patent number: 11476043
    Abstract: An inductive device may be provided, including a substrate and an inductive structure arranged over the substrate. The inductive structure may include a bottom metal winding layer; a top metal winding layer arranged further away from the substrate than the bottom metal winding layer; a magnetic core layer arranged between the bottom metal winding layer and the top metal winding layer; a connector arranged to electrically connect the bottom metal winding layer and the top metal winding layer; and a top metal ring element arranged around the top metal winding layer, spaced apart from the top metal winding layer. The inductive device may further include a guard ring element arranged under the top metal ring element and around the magnetic core layer, spaced apart from the magnetic core layer; wherein the guard ring element may include a magnetic material.
    Type: Grant
    Filed: December 30, 2019
    Date of Patent: October 18, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Zishan Ali Syed Mohammed, Lulu Peng, Lawrence Selvaraj Susai, Chor Shu Cheng
  • Patent number: 11437406
    Abstract: A semiconductor device may be provided, including a substrate which includes a first semiconductor layer having a well region arranged within the first semiconductor layer, a buried insulator layer arranged over the first semiconductor layer, and a second semiconductor layer arranged over the buried insulator layer. The semiconductor device may include a capacitive structure including: the well region, at least one contact to the well region, at least a portion of the buried insulator layer over the well region, at least a portion of the second semiconductor layer, a source region and a drain region arranged over the second semiconductor layer, a gate dielectric layer arranged over the second semiconductor layer and arranged laterally between the source region and the drain region, and a gate layer arranged over the gate dielectric layer. The well region, the source region, and the drain region may have the same conductivity type.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: September 6, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Phyllis Shi Ya Lim, Handoko Linewih, Shu Zhong, Chor Shu Cheng
  • Publication number: 20220189673
    Abstract: An inductive device may be provided, including a first winding layer, a second winding layer arranged over the first winding layer and connected to the first winding layer to form a plurality of turns around a first axis, and a magnetic core arranged vertically between the first winding layer and the second winding layer. The magnetic core may include a portion entirely over the first winding layer and entirely under the second winding layer, where this portion may include a magnetic segment and a non-magnetic segment arranged laterally adjacent to each other along the first axis.
    Type: Application
    Filed: December 10, 2020
    Publication date: June 16, 2022
    Inventors: Zishan Ali SYED MOHAMMED, Lulu PENG, Chor Shu CHENG, Yong Chau NG, Lawrence Selvaraj SUSAI
  • Publication number: 20220181479
    Abstract: A semiconductor device is provided. The semiconductor device comprises a substrate having a wide bandgap semiconductor material and an epitaxial layer arranged over a first surface of the substrate. A source region having a first conductivity type may be arranged in the epitaxial layer. A well region having a second conductivity type may be laterally adjacent to the source region. The first conductivity type may be different from the second conductivity type. A gate dielectric layer may be arranged over the well region. A field dielectric layer may be arranged over the epitaxial layer adjacent to the well region.
    Type: Application
    Filed: December 8, 2020
    Publication date: June 9, 2022
    Inventors: CHOR SHU CHENG, HANDOKO LINEWIH, SIOW LEE CHWA
  • Publication number: 20220068809
    Abstract: A semiconductor device is provided. The semiconductor device comprises an inductor in a far back end of line layer and a capacitor adjacent to and electrically coupled with the inductor. The capacitor comprises a first electrode layer arranged over sidewalls and a bottom surface of a via in a first insulating layer A dielectric layer is provided over the first electrode layer. A second electrode layer is provided over the dielectric layer and a metal fill layer is provided over the second electrode layer. The metal fill layer has a top surface at least level with a top surface of the first insulating layer.
    Type: Application
    Filed: September 3, 2020
    Publication date: March 3, 2022
    Inventors: LULU PENG, NUR AZIZ YOSOKUMORO, ZISHAN ALI SYED MOHAMMED, LAWRENCE SELVARAJ SUSAI, CHOR SHU CHENG, YONG CHAU NG
  • Publication number: 20210202165
    Abstract: An inductive device may be provided, including a substrate and an inductive structure arranged over the substrate. The inductive structure may include a bottom metal winding layer; a top metal winding layer arranged further away from the substrate than the bottom metal winding layer; a magnetic core layer arranged between the bottom metal winding layer and the top metal winding layer; a connector arranged to electrically connect the bottom metal winding layer and the top metal winding layer; and a top metal ring element arranged around the top metal winding layer, spaced apart from the top metal winding layer. The inductive device may further include a guard ring element arranged under the top metal ring element and around the magnetic core layer, spaced apart from the magnetic core layer; wherein the guard ring element may include a magnetic material.
    Type: Application
    Filed: December 30, 2019
    Publication date: July 1, 2021
    Inventors: Zishan Ali SYED MOHAMMED, Lulu PENG, Lawrence Selvaraj SUSAI, Chor Shu CHENG
  • Publication number: 20210193692
    Abstract: A semiconductor device may be provided, including a substrate which includes a first semiconductor layer having a well region arranged within the first semiconductor layer, a buried insulator layer arranged over the first semiconductor layer, and a second semiconductor layer arranged over the buried insulator layer. The semiconductor device may include a capacitive structure including: the well region, at least one contact to the well region, at least a portion of the buried insulator layer over the well region, at least a portion of the second semiconductor layer, a source region and a drain region arranged over the second semiconductor layer, a gate dielectric layer arranged over the second semiconductor layer and arranged laterally between the source region and the drain region, and a gate layer arranged over the gate dielectric layer. The well region, the source region, and the drain region may have the same conductivity type.
    Type: Application
    Filed: December 20, 2019
    Publication date: June 24, 2021
    Inventors: Phyllis Shi Ya LIM, Handoko LINEWIH, Shu ZHONG, Chor Shu CHENG
  • Publication number: 20210111243
    Abstract: A semiconductor device may include: a substrate; a protective region provided over the substrate; and a core structure enclosed by the protective region. The core structure may include a core material etchable by a chemical solution. The protective region may include a protective material resistant to etching by the chemical solution. The core structure may have a first side and a second side opposite to the first side, the first side being closer to the substrate than the second side. The core structure may be narrowest at the first side of the core structure.
    Type: Application
    Filed: October 15, 2019
    Publication date: April 15, 2021
    Inventors: Lawrence Selvaraj SUSAI, Chor Shu CHENG, Yong Chau NG, Lulu PENG, Zishan Ali SYED MOHAMMED, Nuraziz YOSOKUMORO
  • Publication number: 20210098363
    Abstract: A device may include a substrate, and an interlevel dielectric arranged over the substrate. The interlevel dielectric may include a first interlevel dielectric layer in an interconnect level i, the first interlevel dielectric layer having a first interconnect and a second interconnect therein. A nitride block insulator may be arranged over the first interlevel dielectric layer and over the first interconnect and the second interconnect. An opening may be arranged in the nitride block insulator, the opening extending through the nitride block insulator to expose a surface of the first interconnect in the first interlevel dielectric layer. A contact plug may be arranged in the opening of the nitride block insulator. The contact plug at least lines the opening and prevents out-diffusion of conductive material from the first interconnect. A thin film of a passive component may be arranged over the nitride block insulator and over the contact plug.
    Type: Application
    Filed: September 30, 2019
    Publication date: April 1, 2021
    Inventors: Handoko LINEWIH, Chor Shu CHENG, Tze Ho Simon CHAN, Yudi SETIAWAN
  • Publication number: 20160181197
    Abstract: Device and method for forming a device are disclosed. A substrate which is prepared with a dielectric layer having a top metal level of the device is provided. The top metal level includes top level conductive lines. A top dielectric layer which includes top via openings in communication with the top level conductive lines is formed over the top metal level. A patterned top conductive layer is formed on the top dielectric layer. The patterned top conductive layer includes a top via in the top via opening and a top conductive line. A first passivation sub-layer is formed to line the patterned conductive layer and exposed top dielectric layer. A plasma treatment is performed on the surface of the first passivation sub-layer to form a nitrided layer. A second passivation sub-layer is formed to line the nitrided layer. The plasma treatment improves the passivation integrity of the passivation stack.
    Type: Application
    Filed: February 29, 2016
    Publication date: June 23, 2016
    Inventors: Xuesong RAO, Meng Meng Vanessa CHONG, Chim Seng SEET, Hendro MARIO, Aison JOHN GEORGE, Chor Shu CHENG
  • Patent number: 9293388
    Abstract: Device and method for forming a device are disclosed. A substrate which is prepared with a dielectric layer having a top metal level of the device is provided. The top metal level includes top level conductive lines. A top dielectric layer which includes top via openings in communication with the top level conductive lines is formed over the top metal level. A patterned top conductive layer is formed on the top dielectric layer. The patterned top conductive layer includes a top via in the top via opening and a top conductive line. A first passivation sub-layer is formed to line the patterned conductive layer and exposed top dielectric layer. A plasma treatment is performed on the surface of the first passivation sub-layer to form a nitrided layer. A second passivation sub-layer is formed to line the nitrided layer. The plasma treatment improves the passivation integrity of the passivation stack.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: March 22, 2016
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xuesong Rao, Meng Meng Vanessa Chong, Chim Seng Seet, Hendro Mario, Aison John George, Chor Shu Cheng
  • Publication number: 20150108654
    Abstract: Device and method for forming a device are disclosed. A substrate which is prepared with a dielectric layer having a top metal level of the device is provided. The top metal level includes top level conductive lines. A top dielectric layer which includes top via openings in communication with the top level conductive lines is formed over the top metal level. A patterned top conductive layer is formed on the top dielectric layer. The patterned top conductive layer includes a top via in the top via opening and a top conductive line. A first passivation sub-layer is formed to line the patterned conductive layer and exposed top dielectric layer. A plasma treatment is performed on the surface of the first passivation sub-layer to form a nitrided layer. A second passivation sub-layer is formed to line the nitrided layer. The plasma treatment improves the passivation integrity of the passivation stack.
    Type: Application
    Filed: October 22, 2013
    Publication date: April 23, 2015
    Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xuesong RAO, Meng Meng Vanessa CHONG, Chim Seng SEET, Hendro MARIO, Aison JOHN GEORGE, Chor Shu CHENG
  • Patent number: 8188550
    Abstract: A method of forming an IC is presented. The method includes providing a substrate having a plurality of transistors formed thereon. The transistors have gate stack, source and drain regions. An electrical strap is formed and in contact with at least a portion of at least one sidewall of the gate stack of a first transistor to provide a continuous electrical flowpath over a gate electrode of the first transistor and the source or drain region of a second transistor.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: May 29, 2012
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lieyong Yang, Siau Ben Chiah, Ming Lei, Hua Xiao, Xiongfei Yu, Kelvin Tianpeng Guan, Puay San Chia, Chor Shu Cheng, Gary Chia, Chee Kong Leong, Sean Lian, Kin San Pey, Chao Yong Li
  • Publication number: 20090166758
    Abstract: A method of forming an IC is presented. The method includes providing a substrate having a plurality of transistors formed thereon. The transistors have gate stack, source and drain regions. An electrical strap is formed and in contact with at least a portion of at least one sidewall of the gate stack of a first transistor to provide a continuous electrical flowpath over a gate electrode of the first transistor and the source or drain region of a second transistor.
    Type: Application
    Filed: September 30, 2008
    Publication date: July 2, 2009
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
    Inventors: Lieyong YANG, Siau Ben CHIAH, Ming LEI, Hua XIAO, Xiongfei YU, Kelvin Tianpeng GUAN, Puay San CHIA, Chor Shu CHENG, Gary CHIA, Chee Kong LEONG, Sean LIAN, Kin San PEY, Chao Yong LI