Patents by Inventor Chris Kiley

Chris Kiley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer center finding
    Patent number: 7792350
    Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
    Type: Grant
    Filed: March 5, 2007
    Date of Patent: September 7, 2010
    Assignee: Brooks Automation, Inc.
    Inventors: Chris Kiley, Peter van der Meulen, Forest Buzan, Paul E. Fogel
  • Chain driven positioning device methods and systems
    Publication number: 20070144421
    Abstract: Aspects of the present invention relate to providing a chain driven positioning device. In embodiments, methods and systems are provided for the chain driven positioning device use in a vacuum environment. A method and system of a positioning device, providing a positioning arm; and driving the positioning arm with a chain.
    Type: Application
    Filed: December 13, 2005
    Publication date: June 28, 2007
    Inventor: Chris Kiley